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Mechanical Property Determination for Supported Polymer Films using Double Bending Beams

Published online by Cambridge University Press:  25 February 2011

B. J. Han ,
H. M. Tong ,
K. Saenger  and
Carl C. Gryte
B. J. Han
Affiliation:
IBM T. J. Watson Research Center, Yorktown Heights, New York 10598 Department of Chemical Engineering and Applied Chemistry, Columbia University, New York, New York 10027
H. M. Tong
Affiliation:
IBM T. J. Watson Research Center, Yorktown Heights, New York 10598
K. Saenger
Affiliation:
IBM T. J. Watson Research Center, Yorktown Heights, New York 10598
Carl C. Gryte
Affiliation:
Department of Chemical Engineering and Applied Chemistry, Columbia University, New York, New York 10027
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Abstract

A double-bending-beam technique has been developed to determine the mechanical properties (e.g., the elastic stiffness parameter and the in-plane coefficient of thermal expansion) of thin polymer films during thermal cycling. The mechanical properties of poly(methyl methacrylate) and a polyimide have been determined from the combined stress-temperature relationships of identical polymer films coated on two rigid beams (each with a distinctly different Young's modulus and coefficient of thermal expansion). The measured mechanical properties were found to agree with data obtained using conventional techniques. The double-bending-beam technique can be applied to a wide variety of dry and wet processing situations involving thin polymer films.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 76: Symposium C – Science and Technology of Microfabrication , 1986 , 123
Copyright
Copyright © Materials Research Society 1987

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References

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