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Mechanical Properties of Platinum Films on Silicon and Glass Determined by Ultra-Microindentation

Published online by Cambridge University Press:  21 February 2011

Jaroslav Mencik  and
Michael V. Swain
Jaroslav Mencik
Affiliation:
CSIRO Division of Applied Physics, Lindfield NSW 2070, Department of Mechanical and Mechatronic Engineering University of Sydney, NSW 2006 Australia
Michael V. Swain
Affiliation:
CSIRO Division of Applied Physics, Lindfield NSW 2070, Department of Mechanical and Mechatronic Engineering University of Sydney, NSW 2006 Australia
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Abstract

Platinum films of thickness 0.5 - 1.2 - 3.0 μm, deposited by magnetron sputtering onto glass and silicon, were investigated using ultra-microindentation. The tests were done with a pointed (Berkovich) indenter. The values of the hardness and elastic modulus of the composite “film + substrate” and the substrates alone were obtained for various loads and depths of penetration, and used to evaluate the hardness and elastic modulus of the films. The use of various film thicknesses and substrates has enabled us to investigate in more detail the influence of the contact radius/contact depth compared to the film thickness as well as the substrate properties on the total indentation behaviour. Various approaches to the data evaluation are discussed in the paper.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 356: Symposium B2 – Thin Films: Stresses and Mechanical Properties V , 1994 , 729
Copyright
Copyright © Materials Research Society 1995

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