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Mechanical Properties of Indium Tin Oxide on Polyethylene Napthalate Substrate

Published online by Cambridge University Press:  01 February 2011

Shekhar Bhagat ,
Y. Zoo ,
H. Han ,
J. Lewis ,
S. Grego ,
K. Lee ,
S. Iyer  and
T. L. Alford
Shekhar Bhagat
Affiliation:
[email protected], Arizona State University, School of Materials, 1115 E Lemon Street,, #202, Tempe, AZ, 85281, United States, 4806486921
Y. Zoo
Affiliation:
[email protected], Arizona State University, School of Materials, Tempe, AZ, 85287, USA, United States
H. Han
Affiliation:
[email protected], Arizona State University, School of Materials, Tempe, AZ, 85287, USA, United States
J. Lewis
Affiliation:
[email protected], RTI International Inc., Research Triangle Park, NC, 27709, USA, United States
S. Grego
Affiliation:
[email protected], RTI International Inc., Research Triangle Park, NC, 27709, USA, United States
K. Lee
Affiliation:
[email protected], North Carolina A&T State University, Electrical and Computers Engineering, Greensboro, NC, 27411, USA, United States
S. Iyer
Affiliation:
[email protected], North Carolina A&T State University, Electrical and Computers Engineering, Greensboro, NC, 27411, USA, United States
T. L. Alford
Affiliation:
[email protected], Arizona State University, School of Materials, Tempe, AZ, 85287, USA, United States
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Abstract

This work investigates the mechanical properties of ITO on PEN substrates as a function of processing conditions, including rf power, substrate temperature, and substrate treatment. The best mechanical performance is obtained from high substrate temperature and low rf power. Plasma treatment gases also influence mechanical properties, with mixture of nitrogen and hydrogen gases producing the best results. This work provides an initial understanding of the impact of sputter process conditions on film's mechanical performance.

Keywords

transparent conductorsputteringpolymer
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1012: Symposium Y – Thin-Film Compound Semiconductor Photovoltaics-2007 , 2007 , 1012-Y12-21
Copyright
Copyright © Materials Research Society 2007

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References

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