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Mechanical Properties of CVD Tungsten Fibers

Published online by Cambridge University Press:  25 February 2011

David Lilienfeld ,
James Steinwall  and
Peter Borgesen
David Lilienfeld
Affiliation:
National Nanofabrication Facility
James Steinwall
Affiliation:
Department of Materials Science and EngineeringCornell University
Peter Borgesen
Affiliation:
Department of Materials Science and EngineeringCornell University
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Abstract

Tungsten fibers were fabricated with dimensions relevant to microelectronics and microfabrication. The strength and modulus were 1.57±0.7GPa and 276±lO%GPa, respectively. The failure mode was most consistent with intergranular fracture.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 203: Symposium D – Electronic Packaging Materials Science V , 1990 , 335
Copyright
Copyright © Materials Research Society 1991

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References

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