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Mechanical properties and size effect in nanometric W/Cu multilayers

Published online by Cambridge University Press:  01 February 2011

P. Villain ,
D. Faurie ,
P.-O. Renault ,
E. Le Bourhis ,
P. Goudeau  and
K.-F. Badawi
P. Villain
Affiliation:
Laboratoire de Métallurgie Physique, UMR 6630 CNRS - Université de Poitiers, SP2MI, Bd Marie et Pierre Curie, BP 30179, 86962 Futuroscope Chasseneuil Cedex, France.
D. Faurie
Affiliation:
Laboratoire de Métallurgie Physique, UMR 6630 CNRS - Université de Poitiers, SP2MI, Bd Marie et Pierre Curie, BP 30179, 86962 Futuroscope Chasseneuil Cedex, France.
P.-O. Renault
Affiliation:
Laboratoire de Métallurgie Physique, UMR 6630 CNRS - Université de Poitiers, SP2MI, Bd Marie et Pierre Curie, BP 30179, 86962 Futuroscope Chasseneuil Cedex, France.
E. Le Bourhis
Affiliation:
Laboratoire de Métallurgie Physique, UMR 6630 CNRS - Université de Poitiers, SP2MI, Bd Marie et Pierre Curie, BP 30179, 86962 Futuroscope Chasseneuil Cedex, France.
P. Goudeau
Affiliation:
Laboratoire de Métallurgie Physique, UMR 6630 CNRS - Université de Poitiers, SP2MI, Bd Marie et Pierre Curie, BP 30179, 86962 Futuroscope Chasseneuil Cedex, France.
K.-F. Badawi
Affiliation:
Laboratoire de Métallurgie Physique, UMR 6630 CNRS - Université de Poitiers, SP2MI, Bd Marie et Pierre Curie, BP 30179, 86962 Futuroscope Chasseneuil Cedex, France.
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Abstract

The mechanixcal behavior of W/Cu multilayers with periods ranging from 24 down to 3 nm prepared by ion beam sputtering was analyzed using a method combining X-ray diffraction and tensile testing, and instrumented indentation. Cracks perpendicular to the tensile axis observed by optical microscopy were generated in the films under the largest applied tensile stresses. These cracks may appear in the multilayer while W layers are still in a compressive stress state. Elastic modulus and hardness values were extracted from nano-indentation data. Crack initiation and elastic constants were observed to depend on the period of these multilayers.

Keywords

MultilayersX-ray diffractionmechanical propertiescrackssize effects
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 875: Symposium O – Thin Films - Stresses and Mechanical Properties XI , 2005 , O1.3
Copyright
Copyright © Materials Research Society 2005

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