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Mechanical and Optical Properties of The Films of Tantalum Oxide Deposited by Ion-Assisted Deposition

Published online by Cambridge University Press:  15 February 2011

PJ. Martin ,
A. Bendavid ,
M.V. Swain ,
R.P. Netterfield ,
T.J. Kinder ,
W.G. Sainty  and
D. Drage
PJ. Martin
Affiliation:
CSIRO Division of Applied Physics, Sydney Australia 2070
A. Bendavid
Affiliation:
CSIRO Division of Applied Physics, Sydney Australia 2070
M.V. Swain
Affiliation:
CSIRO Division of Applied Physics, Sydney Australia 2070
R.P. Netterfield
Affiliation:
CSIRO Division of Applied Physics, Sydney Australia 2070
T.J. Kinder
Affiliation:
CSIRO Division of Applied Physics, Sydney Australia 2070
W.G. Sainty
Affiliation:
CSIRO Division of Applied Physics, Sydney Australia 2070
D. Drage
Affiliation:
CSIRO Division of Applied Physics, Sydney Australia 2070
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Abstract

Thin films of tantalum oxide 1 μm thick were deposited by oxygen ion-assisted electron-beam evaporation onto silicon and glass substrates. The packing density and optical properties of the films were controlled by the degree of ion assistance during growth. The films were characterized for hardness by ultra-micro indentation measurement and density by RBS. A strong correlation of hardness, and optical properties was found with the ion-to-vapor arrival ratio at the substrate during deposition. Evaporated films without ion assistance were found to be relatively soft with hardness values of 5.3 GPa and 6.5 GPa on glass and silicon respectively when measured with a Berkovich indenter. When the ion bombardment was increased the film hardness increased to a maximum hardness of 10 GPa for 1000 eV O2 ion bombardment. The measured microhardness of the films was found to be influenced by the nature of the substrate for all depositions with higher microhardness values being recorded for films deposited onto silicon. The films were found to be amorphous and homogeneous. Additional ultra-microhardness measurements with a spherical tipped indenter enabled the depth dependence of hardness and modulus to be determined.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 308: Symposium M1 – Thin Films: Stresses and Mechanical Properties IV , 1993 , 583
Copyright
Copyright © Materials Research Society 1993

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References

REFERENCES

1 Martin, P.J., J. Mater. Sci., 21, 1 (1986).CrossRefGoogle Scholar
2 Martin, P.J., Bendavid, A., Swain, M.V. Submitted to Thin Solid Films.Google Scholar
3 Field, J.S. and Swain, M.V., J. Mater. Res., 8, 297 (1993).Google Scholar