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Mechanical and Metallographic Characterization of Liga Fabricated Nickel and 80%Ni-20%Fe Permalloy

Published online by Cambridge University Press:  10 February 2011

T.R. Christenson ,
T.E. Buchheit ,
D.T. Schmale  and
R.J. Bourcier
T.R. Christenson
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-0329
T.E. Buchheit
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-0329
D.T. Schmale
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-0329
R.J. Bourcier
Affiliation:
Photonic Technologies Division, Coming Inc., Coming, NY 14831
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Abstract

A table top servohydraulic load frame equipped with a laser displacement measurement system was constructed for the mechanical characterization of LIGA fabricated electroforms. A drop-in tensile specimen geometry which includes a pattern to identify gauge length via laser scanning has proven to provide a convenient means to monitor and characterize mechanical property variations arising during processing. In addition to tensile properties, hardness and metallurgical data were obtained for nickel deposit specimens of current density varying between 20 and 80 mA/cm2 from a sulfamate based bath. Data from 80/20 nickel/iron deposits is also presented for comparison. As expected, substantial mechanical property differences from bulk metal properties are observed as well as a dependence of material strength on current density which is supported by grain size variation. While elastic modulus values of the nickel electrodeposit are near 160 GPa, yield stress values vary by over 60%. A strong orientation in the metal electrodeposits as well as variations in nucleating and growth morphology present a concern for anisotropic and geometry dependent mechanical properties within and between different LIGA components.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 518: Symposium N – Microelectromechanical Structures for Materials Research , 1998 , 185
Copyright
Copyright © Materials Research Society 1998

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References

1 Becker, E.W., Ehrfeld, W., Hagmann, P., Maner, A., and Munchmeyer, D., Microelectronic Eng. 4, pp. 35–56 (1986).Google Scholar
2 Christenson, T.R., Guckel, H. in Micromachining and Microfabrication Process Technology, (SPIE Proceedings, 2639, Austin, TX, 1995) pp. 134–145.Google Scholar
3 Jacobson, B.E. and Sliwa, J.W., Plating and Surface Finishing, pp. 42–47, (Sept. 1979).Google Scholar
4 Dini, J.W., Electrodeposition – The Materials Science of Coatings and Substrates, (Noyes Publications, Park Ridge, NJ, 1993).Google Scholar
5 Safranek, W.H., The Properties of Electrodeposited Metals and Alloys, (American Electroplaters and Surface Finishers Society, Orlando, FL, 1986).Google Scholar
6 Ruther, P., Bacher, W., Feit, K., and Menz, W., in Proceedings IEEE Tenth Annual International Workshop on Micro Electro Mechanical Systems, (Nagoya, Japan, 1997) pp. 541–545.Google Scholar
7 Dual, J., Mazza, E., Schiltges, G., and Schlums, D., in Microlithography and Metrology in Micromachining III. (SPIE Proceedings, 3225, Austin, TX, 1995), pp. 12–22.Google Scholar
8 Sharpe, W.N. Jr., LaVan, D.A., and Edwards, R.L., in Technical Digest of 1997 IEEE International Conference on Solid-State Sensors and Actuators – Transducers '97 (Chicago, IL 1997) pp. 607–610.Google Scholar
9 Schmale, D.T., Bourcier, R.J., and Buchheit, T.E., Description of a Micro-Mechanical Testing System, SAND97-1608, (Sandia National Laboratories, Albuquerque, NM 1997).Google Scholar
10 Keyence Corporation, http://www.keyence.com.Google Scholar
11 Venkatasetty, H. V., J. Electrochem. Soc., 117, 403–407 (1970).Google Scholar
12 Walker, P. and Tam, W. H., CRC Handbook of Metal Etchants (CRC Press, Boca Raton, FL, 1991).Google Scholar
13 Johnson, H.R., Dini, J.W., and Stoltz, R.E., Plating and Surf. Finishing, 66, (3), 57–62 (1979).Google Scholar
14 Evans, D.J., Trans. Of the Faraday Soc., 54, 1086 (1958).Google Scholar
15 Dini, J.W., Johnson, H.R., and West, L.A., Plating and Surf. Finishing, 65, 36–40 (Feb. 1978).Google Scholar