Article contents
Measurement of Thin Film Mechanical Properties by Microbeam Bending
Published online by Cambridge University Press: 10 February 2011
Abstract
An improved microbeam bending technique has been developed for the study of mechanical properties of thin films on substrates. This testing method utilizes a triangular beam geometry and improved micromachining techniques compared to previously used methods. The technique permits the stress-strain law for a metal film on a substrate to be determined. Single crystal Si beams and bi-layer Si/Al beams of lengths 25–100 pgm have been fabricated and tested. The beams are deflected with a nanoindenter, which accurately imposes a load on the beam and measures the corresponding displacement. For the bi-layer beams, a simple numerical model utilizing a Ramburg-Osgood constitutive law the film has been developed to determine the stress-strain behavior of the Al film.
- Type
- Research Article
- Information
- Copyright
- Copyright © Materials Research Society 1999
References
- 9
- Cited by