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Measurement of Mechanical Properties of Single and Multilayered Nitride thin Films Prepared by Cathodic Arc Deposition

Published online by Cambridge University Press:  17 March 2011

A.K. Sikder ,
I. M. Irfan ,
Ashok Kumar ,
Robert Durvin ,
Mark McDonough  and
M. D. Smith
A.K. Sikder
Affiliation:
Center for Microelectronics Research, University of South Florida, Tampa, FL 33620
I. M. Irfan
Affiliation:
Center for Microelectronics Research, University of South Florida, Tampa, FL 33620
Ashok Kumar
Affiliation:
Center for Microelectronics Research, University of South Florida, Tampa, FL 33620 Also with Department of Mechanical Engineering
Robert Durvin
Affiliation:
BryCoat Inc., Safety Harbor, Florida 34695-3403.
Mark McDonough
Affiliation:
BryCoat Inc., Safety Harbor, Florida 34695-3403.
M. D. Smith
Affiliation:
BryCoat Inc., Safety Harbor, Florida 34695-3403.
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Abstract

Mechanical properties of thin films differ significantly from those of bulk materials due to the effects of interfaces, microstructure and thick underlying substrates. In this study we will present the results of nanoindentation tests to evaluate mechanical properties of nitride (TiN, ZrN, CrN, TiCN and TiAlN) thin films. Films were coated on steel substrates using cathodic arc deposition technique. Surface morphology and roughness of the samples are investigated using atomic force microscopy (AFM). Films were also characterized by x-ray diffraction (XRD) technique. Nanoindentation technique along with AFM and XRD methods are very useful for characterizing hard thin coatings.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 697: Symposium P – Surface Engineering 2001--Fundamentals and Applications , January 2001 , P5.4
Copyright
Copyright © Materials Research Society 2002

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