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Mass Spectrometric Thermal Evolution of Novel Indium Metalorganic Precursors for MOCVD

Published online by Cambridge University Press:  22 February 2011

G. Bruno ,
P. Capezzuto ,
G. Cicala ,
M. Losurdo ,
G. Rossetto ,
M. Porchia  and
P. Zanella
G. Bruno
Affiliation:
Centro Studio Chimica Plasmi CNR, via G.Amendola, 173–70126 Bari (Italy)
P. Capezzuto
Affiliation:
Centro Studio Chimica Plasmi CNR, via G.Amendola, 173–70126 Bari (Italy)
G. Cicala
Affiliation:
Centro Studio Chimica Plasmi CNR, via G.Amendola, 173–70126 Bari (Italy)
M. Losurdo
Affiliation:
Centro Studio Chimica Plasmi CNR, via G.Amendola, 173–70126 Bari (Italy)
G. Rossetto
Affiliation:
CNR-Istituto Chimica Tecnologia Materiali, Corso Stati Uniti, 35100 Padua (Italy)
M. Porchia
Affiliation:
CNR-Istituto Chimica Tecnologia Materiali, Corso Stati Uniti, 35100 Padua (Italy)
P. Zanella
Affiliation:
CNR-Istituto Chimica Tecnologia Materiali, Corso Stati Uniti, 35100 Padua (Italy)
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Abstract

The thermal behaviour of dialkylindium-dialkylamides R2InNR/2 (R,R'=Me, Et) and dialkylindium-azolides R2lnNR' (NR'=Pyrrole, Pyrazole) has been examined by a mass spectrometric thermal evolution technique, in the temperature range 30–400°C. Data on volatility, identity of gasified molecules, threshold temperature and products of the decomposition processes are reported and discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 282: Symposium E – Chemical Perspectives of Microelectronic Materials III , 1992 , 69
Copyright
Copyright © Materials Research Society 1993

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References

REFERENCES

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