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Mass Spectrometric Thermal Evolution of Novel Indium Metalorganic Precursors for MOCVD
Published online by Cambridge University Press: 22 February 2011
Abstract
The thermal behaviour of dialkylindium-dialkylamides R2InNR/2 (R,R'=Me, Et) and dialkylindium-azolides R2lnNR' (NR'=Pyrrole, Pyrazole) has been examined by a mass spectrometric thermal evolution technique, in the temperature range 30–400°C. Data on volatility, identity of gasified molecules, threshold temperature and products of the decomposition processes are reported and discussed.
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