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Maskless Etching of SiO2 by Ion Beam Assisted Etching Technique

Published online by Cambridge University Press:  26 February 2011

Zheng Xu ,
Kenji Gamo  and
Susumu Namba
Zheng Xu
Affiliation:
Faculty of Engineering Science, Osaka University Toyonaka, Osaka 560, Japan
Kenji Gamo
Affiliation:
Faculty of Engineering Science, Osaka University Toyonaka, Osaka 560, Japan
Susumu Namba
Affiliation:
Faculty of Engineering Science, Osaka University Toyonaka, Osaka 560, Japan
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Abstract

Characteristics of ion beam assisted etching (IBAE) for SiO2 have been investigated to reveal'a possibility for maskless etching using focused ion beams. The ion beam assisted etching was done by bombarding 50 keV unfocused ion beams in XeF2 atmosphere and effect of various etching parameter on etching characteristics have been investigated. These are the effects of XeF2 gas pressure, bombarding ion species, bombarding angle and H2 addition, etc. Significant enhancements up to 100 times larger than physical sputtering were achieved. The selectivity of SiO2 to Si could be tailored to specific requirements from 0.1 to 6 by changing the gas mixing ratio. The etching rate was approximately proportional to the energy deposition rate bombarded by ion beam on surface. Carbon contamination on surface after etching were improved by the introduction of XeF2 gas.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 101: Symposium B – Laser and Particle-Beam Chemical Processing for Microelectronics , 1987 , 477
Copyright
Copyright © Materials Research Society 1998

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References

REFERENCES

1 Nakamura, H., in Ext. Abst. 19th Conf. SSDM. Tokyo. (1987) P.403 Google Scholar
2 Ochiai, Y., Gamo, K. and Namba, S., J. Vac. Sci. Technol. B 4(1), 333 (1986).Google Scholar
3 Gerlach-Meyer, U., Coburn, J.W. and Kay, E., Sur.Sci. 103, 103 (1981).Google Scholar
4 Gamo, K., Hamauzu, H., Xu, Z. and Namba, S., Jpn. U.S. Seminar. FIB Technol.& Appl.Osaka.(1987). To be pulished in J. Vac. Sci. Technol. (1987).Google Scholar
5 Ziegler, J.F., Helium Stopping Powers and Ranges in All Elements, Vol.4. (Pergamon, New York, 1977)Google Scholar
6 Ziegler, J.F., Biesack, J.P. and Littmark, U., The Stopping and Range of Ions in Solids, Vol.1. (Pergamon, New York, 1985)Google Scholar
7 Hall, T.M., Wagner, A. and Thompson, L.F., J. Vac. Sci. Technol. 16 (1979) 1889.Google Scholar
8 Gamo, K., Takehara, D., Hamamura, Y., Tomita, M. and Namba, S., Microelectronic Eng. 5, 163 (1986)Google Scholar
9 Yokoyama, S., Yamagake, Y. and Hirose, M., Appl. Phys. Lett. 47, 389. (1985)Google Scholar
10 Coburn, J.W. and Winters, H.F., J. Vac. Sci. Technol. 16(2). 391, (1979)Google Scholar