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Magnetoresistive, Mechanically Hard Superlattices of CrN, NbN, TiN Multilayers Deposited on Monocrystalline Si Wafers

Published online by Cambridge University Press:  21 March 2011

Andrzej Wolkenberg ,
Hanna Wrzesinska ,
Andrzej Bochenek ,
Adam Tokarz ,
Zygmunt Nitkiewicz ,
Tomasz Przeslawski ,
Jacek Ratajczak  and
Piotr Dluzewski
Andrzej Wolkenberg
Affiliation:
Institute of Materials Engineering, Department of Metallurgy and Materials Engineering, Technical University of Cz stochowa;
Hanna Wrzesinska
Affiliation:
Institute of Electron Technology, al. Lotników 32/46, 02-668 Warsaw;
Andrzej Bochenek
Affiliation:
Institute of Materials Engineering, Department of Metallurgy and Materials Engineering, Technical University of Cz stochowa;
Adam Tokarz
Affiliation:
Institute of Materials Engineering, Department of Metallurgy and Materials Engineering, Technical University of Cz stochowa;
Zygmunt Nitkiewicz
Affiliation:
Institute of Materials Engineering, Department of Metallurgy and Materials Engineering, Technical University of Cz stochowa;
Tomasz Przeslawski
Affiliation:
Institute of Electron Technology, al. Lotników 32/46, 02-668 Warsaw;
Jacek Ratajczak
Affiliation:
Institute of Electron Technology, al. Lotników 32/46, 02-668 Warsaw;
Piotr Dluzewski
Affiliation:
Institute of Physics, P.Ac.Sci., al. Lotników 32/46, 02-668 Warsaw
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Abstract

Hardness measurements on thin films have to face the problem of the effect of the substrate hardness on the obtained result. Also the method of hardness measurement exerts a considerable influence on the experimental data. Some models, which take such effects into account, are presented. We describe experimental results of hardness measurements made with the Vickers 5g probe. Nitride layers (CrN, TiN, NbN), superlattices composed of these nitrides and thin metal films deposited either on the monocrystalline Si or metallic substrates such as steel or copper have been investigated.

We also present measurements of the magnetoresistivity (MR) effect. on superlattices, which consist of the multilayers TiN/NbN deposited on Si substrates. Layers of different thickness of TiN and NbN obtained by the reactive sputtering method with different superlattice period values (L) and number have been studied. The composite hardness of the structures (superlattice on Si) was found to reach 80 GPa and MR value in the best probes was ~80% (for fields from some Gs to kGs). When the supporting thin metallic layer was present, then its influence on the composite hardness was also observed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 695: Symposium L – Thin Films: Stresses and Mechanical Properties IX , 2001 , L6.21.1
Copyright
Copyright © Materials Research Society 2002

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References

REFERENCES

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