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Luminescent Porous Silicon Investigated by accelerator analytics

Published online by Cambridge University Press:  25 February 2011

Peter Steiner ,
Jens Weidhaas  and
Walter Lang
Peter Steiner
Affiliation:
Fraunhofer-institute for solid state technology, Munich, Germany
Jens Weidhaas
Affiliation:
Fraunhofer-institute for solid state technology, Munich, Germany
Walter Lang
Affiliation:
Fraunhofer-institute for solid state technology, Munich, Germany
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Abstract

Electroluminescent nanoporous silicon is investigated by accelerator techniques. Rutherford Backscattering Spectroscopy (RBS) and Nuclear Reaction Analysis (NRA) are used to measure the oxygen content. The stoichiometry is Si1O1.8 in the top layer and Si1O0.8 in 6 μm depth. Channeling experiments show that only very weak channels are present.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 281: Symposium D – Semiconductor Heterostructures for Photonic and Electronic Applications , 1992 , 531
Copyright
Copyright © Materials Research Society 1993

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References

REFERENCES

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