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Low-Power Liquid Lens Having Si Cylinder Chamber for Capsule Endoscope

Published online by Cambridge University Press:  01 February 2011

Sangwon Seo ,
Seungoh Han ,
Jun-Ho Seo ,
Young-Mok Kim ,
Moon-Sik Kang ,
Nam-Gi Min ,
Woo-Bum Choi  and
Man-Young Sung
Sangwon Seo
Affiliation:
BNP Science CO., LTD., Paju-City, 413-843, Korea, Republic of, Korea University, Seoul, 136-713, Korea, Republic of
Seungoh Han
Affiliation:
[email protected], Hoseo University, Institute of Fusion Technology, 165 Sechul-Ri, Baebang-Myun, Asan-City, 336-795, Korea, Republic of
Jun-Ho Seo
Affiliation:
Korea University, Seoul, 136-713, Korea, Republic of
Young-Mok Kim
Affiliation:
Korea University, Seoul, 136-713, Korea, Republic of
Moon-Sik Kang
Affiliation:
[email protected], Korea University, Seoul, 136-713, Korea, Republic of
Nam-Gi Min
Affiliation:
[email protected], Korea University, Seoul, 136-713, Korea, Republic of
Woo-Bum Choi
Affiliation:
[email protected], BNP Science CO., LTD., Paju-City, 413-843, Korea, Republic of
Man-Young Sung
Affiliation:
[email protected], Korea University, Seoul, 136-713, Korea, Republic of
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Abstract

The liquid lens based on MEMS technology can be an appropriate solution to improve the imaging capability of a capsule endoscope because it can be realized small enough and also consume negligible power. In this paper, a cylinder-type liquid lens was designed to minimize the dead area and then fabricated with MEMS technology combining the silicon thin-film process and the wafer bonding process where the multiple dielectric layer of Teflon, silicon nitride and thermal oxide was formed on the cylinder wall. The focal length of the lens module including the fabricated liquid lens was changed reproducibly as a function of the applied voltage. With the change of 30V in the applied bias, the focal length of the constructed lens module could be tuned in the range of about 42cm. The fabricated liquid lens was also proven to be small enough to be adopted in the capsule endoscope, which means the liquid lens can be utilized for the imaging capability improvement of the capsule endoscope.

Keywords

microelectro-mechanical (MEMS)liquidsensor
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1075: Symposium J – Passive and Electromechanical Materials and Integration , 2008 , 1075-J07-13
Copyright
Copyright © Materials Research Society 2008

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References

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