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Low temperature growth and laser-induced phase transformation of perovskite oxide films for uncooled IR detector applications

Published online by Cambridge University Press:  31 January 2011

Wendy Sarney ,
John W Little ,
Frank E Livingston ,
Krisztian Niesz ,
Melanie W Cole  and
Daniel E Morse
Wendy Sarney
Affiliation:
[email protected]
John W Little
Affiliation:
[email protected], U.S. Army Research Laboratory, Sensors & Electron Devices Directorate, Adelphi, Maryland, United States
Frank E Livingston
Affiliation:
[email protected], The Aerospace Corporation, Micro/Nano Technology Department, Space Materials Laboratory, El Segundo, California, United States
Krisztian Niesz
Affiliation:
[email protected], Institute for Collaborative Biotechnologies, University of California, Santa Barbara, Santa Barbara, California, United States
Melanie W Cole
Affiliation:
[email protected], U.S. Army Research Laboratory, Weapons & Materials Research Directorate, Aberdeen Proving Ground, Maryland, United States
Daniel E Morse
Affiliation:
[email protected], Institute for Collaborative Biotechnologies, University of California, Santa Barbara, Santa Barbara, California, United States
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Abstract

Pyroelectric infrared (IR) detectors based on perovskite oxides are of interest in part because of their lack of need for cooling, which makes them relatively more affordable and operationally simpler than cooled photon detector systems. We are investigating two methods for low-cost growth of perovskite oxide thin films, namely, a bio-inspired, low-temperature synthesis method and a modified industry-standard metalorganic solution deposition (MOSD) method. Subsequent to film synthesis, we utilize direct-write laser phase conversion and micro-electro-mechanical systems (MEMS) fabrication for development of an uncooled IR focal plane array (FPA). Film growth, crystallization and MEMS processes are compatible with monolithic integration of the detector pixels directly onto Si readout integrated circuits (ROICs).

Keywords

laser-induced reactiontransmission electron microscopy (TEM)chemical synthesis
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1199: Symposium F –Multiferroic and Ferroelectric Materials , 2009 , 1199-F03-56
Copyright
Copyright © Materials Research Society 2010

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References

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