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Low Energy Ne Scattering Spectroscopy for Insulators, and Materials in the Electric/Magnetic Fields

Published online by Cambridge University Press:  17 June 2011

Kenji Umezawa ,
Shigemitsu Nakanishi ,
Hideki Hayashi ,
Hideaki Higashitsutsumi ,
Hiroki Nagasawa ,
Eisuke Narihiro  and
Keiko Ogai
Kenji Umezawa
Affiliation:
Dept. of Physics, Osaka Prefecture University, 1-1 Gakuen-Cho, Sakai 599-8531, Japan
Shigemitsu Nakanishi
Affiliation:
Pascal Co. Ltd., 1-1-4 Shouwa-Cho, Abeno, Osaka 545-0011, Japan
Hideki Hayashi
Affiliation:
Pascal Co. Ltd., 1-1-4 Shouwa-Cho, Abeno, Osaka 545-0011, Japan
Hideaki Higashitsutsumi
Affiliation:
Pascal Co. Ltd., 1-1-4 Shouwa-Cho, Abeno, Osaka 545-0011, Japan
Hiroki Nagasawa
Affiliation:
Pascal Co. Ltd., 1-1-4 Shouwa-Cho, Abeno, Osaka 545-0011, Japan
Eisuke Narihiro
Affiliation:
Pascal Co. Ltd., 1-1-4 Shouwa-Cho, Abeno, Osaka 545-0011, Japan
Keiko Ogai
Affiliation:
Apco Co. Ltd., 522-10 Kitano-Cho, Hachiouji, Tokyo 192-0906, Japan
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Abstract

This study describes a low-energy atom scattering system that was combined with a time-of-flight spectrometer for insulator surface structural analysis. We show one example. MgO(001) crystal was used to study the surface analysis technique and is illustrated here. Insulator surface structure is difficult to study because of the charging effects during electron or ion-beam bombardment. Nevertheless, structural analysis of insulator surfaces is very important in fundamental research as well as in technology fields.

Keywords

ion scattering spectroscopy (ISS)insulatorstructural
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1318: Symposium SS/TT/UU/VV – Advances in Spectroscopy and Imaging of Surfaces and Nanostructures , 2011 , mrsf10-1318-ss05-05
Copyright
Copyright © Materials Research Society 2011

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References

REFERENCES

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