Hostname: page-component-f554764f5-nwwvg Total loading time: 0 Render date: 2025-04-10T16:47:48.993Z Has data issue: false hasContentIssue false
  • English
  • Français

Long-Term Stability of Nickel in Resonant Micro-Mechanical Devices

Published online by Cambridge University Press:  15 February 2011

G.L. Povirk ,
J. Bernstein  and
S.B. Brown
G.L. Povirk
Affiliation:
Department of Material Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139 USA
J. Bernstein
Affiliation:
The Charles Stark Draper Laboratory, Cambridge, Massachusetts 02139 USA
S.B. Brown
Affiliation:
Department of Material Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139 USA
Get access

Abstract

A nickel micromechanical device was resonated and the natural frequency of the structure was monitored over time. Any structural rearrangement or damage initiation in the material was expected to cause a corresponding change in the resonant frequency of the device. The resonant frequency of the device was initially about 31.8 kHz and the frequency was found to decline over time at a rate of 0.17 Hz/s.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 308: Symposium M1 – Thin Films: Stresses and Mechanical Properties IV , 1993 , 147
Copyright
Copyright © Materials Research Society 1993

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Article purchase

Temporarily unavailable

References

REFERENCES

1 Bernstein, J., Clio, S., King, A.T., Kourepenis, A., Maciel, P., and Weinberg, M., "A Micromachined Comb-Drive Tuning Fork Gyroscope", in Proceedings of IEEE Micro Electro Mechanical Systems, edited by Pisano, A.P. and Lang, J.H., February, 1993 p.143.Google Scholar
2 Connally, J. and Brown, S.B., "Micromechanical Fatigue Testing", to appear in Experimental Mechanics Google Scholar
3 Connally, J., PhD thesis, Massachusetts Institute of Technology, 1992.Google Scholar
4 Tang, W.C., Nguyen, N.H., and Howe, R.T.,"Laterally Driven Polysilicon Resonant Microstructures", Sensors and Actuators, 20, 25 (1989).Google Scholar
5 Hibbitt, , Karlsson and Sorensen, Inc., "ABAQUS User's Manual", (1989).Google Scholar
6 Everhart, J.L., Engineering Properties of Nickel and Nickel Alloys. Plenum Press, New York, 1971, p. 18–19.Google Scholar