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Long-Term Stability of Nickel in Resonant Micro-Mechanical Devices

Published online by Cambridge University Press:  15 February 2011

G.L. Povirk ,
J. Bernstein  and
S.B. Brown
G.L. Povirk
Affiliation:
Department of Material Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139 USA
J. Bernstein
Affiliation:
The Charles Stark Draper Laboratory, Cambridge, Massachusetts 02139 USA
S.B. Brown
Affiliation:
Department of Material Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139 USA
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Abstract

A nickel micromechanical device was resonated and the natural frequency of the structure was monitored over time. Any structural rearrangement or damage initiation in the material was expected to cause a corresponding change in the resonant frequency of the device. The resonant frequency of the device was initially about 31.8 kHz and the frequency was found to decline over time at a rate of 0.17 Hz/s.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 308: Symposium M1 – Thin Films: Stresses and Mechanical Properties IV , 1993 , 147
Copyright
Copyright © Materials Research Society 1993

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References

REFERENCES

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