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Localized 56Fe+ ion implantation of TiO2 using anodic porous alumina

Published online by Cambridge University Press:  31 January 2011

Jens Jensen ,
Ruy Sanz ,
Mirian Jaafar ,
Manuel Hernández-Vélez ,
Agustina Asenjo ,
Anders Hallen  and
Manuel Vázquez
Jens Jensen
Affiliation:
[email protected]@telia.com, Linköping University, Department of Physics, Chemistry and Biology - IFM, Linköping, Sweden
Ruy Sanz
Affiliation:
[email protected], Consejo Superior de Investigaciones Cientificas, Instituto de Ciencia de Materiales de Madrid, Madrid, Spain
Mirian Jaafar
Affiliation:
[email protected], Consejo Superior de Investigaciones Cientificas, Instituto de Ciencia de Materiales de Madrid, Madrid, Spain
Manuel Hernández-Vélez
Affiliation:
[email protected], Universidad Autónoma de Madrid, Departamento de Física Aplicada, Madrid, Spain
Agustina Asenjo
Affiliation:
[email protected], Consejo Superior de Investigaciones Cientificas, Instituto de Ciencia de Materiales de Madrid, Madrid, Spain
Anders Hallen
Affiliation:
[email protected], Royal Institute of Technology, ICT-MAP, Stockholm, Sweden
Manuel Vázquez
Affiliation:
[email protected], Consejo Superior de Investigaciones Cientificas, Instituto de Ciencia de Materiales de Madrid, Madrid, Spain
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Abstract

We present result following localized ion implantation of rutile titanium dioxide (TiO2) using anodic porous alumina as a mask. The implantation were performed with 100 keV 56Fe+ ions using a fluence of 1.3·1016 ions/cm2. The surface modifications where studied by means of SEM, AFM/MFM and XRD. A well-defined hexagonal pattern of modified material in the near surface structure is observed. Local examination of the implanted areas revealed no clear magnetic signal. However, a variation in mechanical and electrostatic behavior between implanted and non-implanted zones is inferred from the variation in AFM signals.

Keywords

ion-implantationmagnetic propertiesnanostructure
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1181: Symposium DD – Ion Beams and Nano-Engineering , 2009 , 1181-DD01-04
Copyright
Copyright © Materials Research Society 2009

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References

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