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Limits on the Accuracy of Stoichiometry Determined by Rutherford Backscattering Using Computer Peak Fitting.

Published online by Cambridge University Press:  25 February 2011

L. C. Mcintyre Jr ,
M. D. Ashbaugh  and
J. A. Leavitt
L. C. Mcintyre Jr
Affiliation:
Department of Physics, University of Arizona, Tucson, AZ 85721
M. D. Ashbaugh
Affiliation:
Department of Physics, University of Arizona, Tucson, AZ 85721
J. A. Leavitt
Affiliation:
Department of Physics, University of Arizona, Tucson, AZ 85721
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Abstract

Rutherford Backscattering Spectrometry (RBS) using MeV ions is capable of routinely measuring absolute atomic areal densities to an accuracy of about 3% and relative areal densities to a fraction of 1% if the elastic scattering peaks from different elements do not overlap. The accuracy of areal density measurements can be seriously reduced in cases where the sample thickness is large enough to cause overlapping peaks. We report here an investigation of the use of standard computer fitting techniques to analyze overlapping peaks in elastic scattering spectra and its effect on the accuracy of the final results of an RBS analysis.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 93: Symposium C – Materials Modification and Growth Using Ion Beams , 1987 , 401
Copyright
Copyright © Materials Research Society 1987

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References

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