Hostname: page-component-cd9895bd7-q99xh Total loading time: 0 Render date: 2024-12-27T01:34:07.083Z Has data issue: false hasContentIssue false
  • English
  • Français

Limitations on Roll Based Microcontact Printing Imposed by Variations in Macro Scale Stamp Dimensions

Published online by Cambridge University Press:  30 March 2012

Joseph E. Petrzelka  and
David E. Hardt
Joseph E. Petrzelka
Affiliation:
Massachusetts Institute of Technology, 77 Massachusetts Ave., Cambridge, MA 02139, U.S.A.
David E. Hardt
Affiliation:
Massachusetts Institute of Technology, 77 Massachusetts Ave., Cambridge, MA 02139, U.S.A.
Get access

Abstract

Microcontact printing is a versatile patterning technique, but is often limited by deformation of the stamp pattern. This paper examines the sensitivity of stamp pressure distributions to variations in displacement when the microcontact printing stamp is mounted on a rigid roll. To this end, we examine analytic and numeric solutions to the contact problem and verify our models with experimental data. Using these results, we provide insight to process limits imposed by dimensional errors in the printing system.

Keywords

lithography (deposition)simulationnanoscale
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1401: Symposium T – Large-Area Processing and Patterning for Active Optical and Electronic Devices III , 2012 , mrsf11-1401-t02-06
Copyright
Copyright © Materials Research Society 2012

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

[1] Kumar, A., and Whitesides, G. M., 1993, “Features of gold having micrometer to centimeter dimensions can be formed through a combination of stamping with an elastomeric stamp and an alkanethiol ‘“ink”’ followed by chemical etching,” Applied Physics Letters, 63(14), p. 2002.Google Scholar
[2] Xia, Y., Qin, D., and Whitesides, G. M., 1996, “Microcontact printing with a cylind rolling stamp: A practical step toward automatic manufacturing of patterns with submicrometer-sized features,” Advanced Materials, 8(12), pp. 1015–1017 Google Scholar
[3] Helmuth, J. a, Schmid, H., Stutz, R., Stemmer, A., and Wolf, H., 2006, “High microcontact printing.,” Journal of the American Chemical Society, 128(29), pp. 9296–7.Google Scholar
[4] Sharp, K. G., Blackman, G. S., Glassmaker, N. J., Jagota, A., and Hui, C.-Y., 2004, “Effect of stamp deformation on the quality of microcontact Langmuir: the ACS journal of surfaces and colloids, 20(15), pp. 6430–8.Google Scholar
[5] Roca-Cusachs, P., Rico, F., Martínez, E., Toset, J., Farré, R., and Navajas, D., 2005, “Stability of microfabricated high aspect ratio structures in poly(dimethylsiloxane).,” Langmuir: the ACS journal of surfaces and colloids, 21(12), pp. 5542–8.Google Scholar
[6] Hui, C. Y., Jagota, a, Lin, Y. Y., and Kramer, E. J., 2002, “Constraints on Microcontact Printing Imposed by Stamp Deformation,” Langmuir, 18(4), pp. 1394–1407.Google Scholar
[7] Delamarche, E., Schmid, H., Michel, B., and Biebuyck, H., 1997, “Stability of molded polydimethylsiloxane microstructures,” Advanced Materials, 9(9), pp. 741–746.Google Scholar
[8] Bietsch, A., and Michel, B., 2000, “Conformal contact and pattern stability of stamps used for soft lithography,” Journal of Applied Physics, 88(7), p. 4310.Google Scholar
[9] Biebuyck, H. a, Larsen, N. B., Delamarche, E., and Michel, B., 1997, “Lithography beyond light: Microcontact printing with monolayer resists,” IBM Journal of Research and Development, 41(1), pp. 159–170.Google Scholar
[10] Timoshenko, S. P., 1951, Theory of Elasticity , McGraw-Hill.Google Scholar
[11] Johnson, K. L., 1987, Contact Mechanics , Cambridge University Press.Google Scholar
[12] Meijers, P., 1968, “The contact problem of a rigid cylinder on an elastic layer,” Applied Scientific Research, 18(1), pp. 353–383.Google Scholar
[13] Bentall, R., and Johnson, K., 1968, “An elastic strip in plane rolling contact,” International Journal of Mechanical Sciences, 10(8), pp. 637–663.Google Scholar
[14] Petrzelka, J. E., and Hardt, D. E., “Static Load-Displacement Behavior of PDMS Microfeatures for Soft Lithography,” unpublished.Google Scholar
[15] Johnson, K., Kendall, K., and Roberts, A., 1971, “Surface energy and the contact of elastic solids,” Proceedings of the Royal Society of London. Series A, Mathematical and Physical Sciences, 324(1558), pp. 301–313.Google Scholar
[16] Petrzelka, J. E., and Hardt, D. E., 2011, “ Continuous Contact Control for Microcontact Printing using Precision Position Stage with Optical Feedback ,” ASPE Annual Meeting, Denver, CO.Google Scholar