Hostname: page-component-586b7cd67f-rdxmf Total loading time: 0 Render date: 2024-11-29T06:04:52.499Z Has data issue: false hasContentIssue false
  • English
  • Français

Lead Zirconate Titanate Films Produced by Pulsed Laser Deposition

Published online by Cambridge University Press:  16 February 2011

K. L. Saenger ,
R. A. Roy ,
K. F. Etzold  and
J. J. Cuomo
K. L. Saenger
Affiliation:
IBM Research Division, T. J. Watson Research Center, Yorktown Heights, NY 10598
R. A. Roy
Affiliation:
IBM Research Division, T. J. Watson Research Center, Yorktown Heights, NY 10598
K. F. Etzold
Affiliation:
IBM Research Division, T. J. Watson Research Center, Yorktown Heights, NY 10598
J. J. Cuomo
Affiliation:
IBM Research Division, T. J. Watson Research Center, Yorktown Heights, NY 10598
Get access

Abstract

The synthesis of ferroelectric lead zirconate titanate (PZT) films by pulsed laser deposition at 248 nm is described. This study has focused on producing thin (≲ 0.6μm) PZT films on bare and platinum coated MgO < 100 > substrates. Deposition was in an oxygen gas ambient (30 mTorr) at temperatures typically ∼ 525 °C. Rutherford Backscattering Spectroscopy (RBS) was used to evaluate film composition. Film lead content was found to decrease both with increasing laser fluence, and increasing substrate temperature. Film microstructure was evaluated by x-ray diffraction. Electrical measurements were made on the films before and after annealing to determine the dielectric constant and polarization. Properties after annealing were substantially improved, with dielectric permittivity values comparable to bulk PZT.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 200: Symposium Y – Ferroelectric Thin Films I , 1990 , 115
Copyright
Copyright © Materials Research Society 1990

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Scott, J. F. and Araujo, C. A. Paz de, Science, 246 1400 (1989).Google Scholar
2. Roy, R. A., Etzold, K. F., and Cuomo, J. J., "Ferroelectric Film Synthesis, Past and Present: A Select Review", Mat. Res. Soc. Symp. Proc., this volume.Google Scholar
3. Saenger, K. L., Roy, R. A., Gupta, J., Doyle, J. P., and Cuomo, J.J., Laser Interferometric Temperature Measurement of Heated Substrates Used for High T, Superconductor Deposition, to be published in Symposium Proceedings M of the Fall 1989 Materials Research Society Meeting, High Temperature Superconductors: Fundamental Properties and Novel Materials Processing, Materials Research Society, Pittsburgh, PA, 1990.Google Scholar
4. Saenger, K. L. and Gupta, J., “Laser Interferometric Thermometry for Substrate Temperature Measurement”, submitted to Appl. Opt. (1990).Google Scholar
5. Venkatesan, T., Wu, X. D., Inam, A., and Wachtman, J. B., Appl. Phys. Lett., 52 1193 (1988).Google Scholar
6. Roy, R. A., Etzold, K. F., and Cuomo, J. J., "Lead Zirconate Titanate Films Produced by 'Facing Targets' RF-Sputtering", this volume.Google Scholar
7. Krupanidhi, S. B., Maffei, N., Sayer, M., and EI-Assal, K., J. Appl. Phys., 54 6601 (1983).Google Scholar
8. Jaffe, B., Cook, W. R., and Jaffe, H., Piezoelectric Ceramics Academic Press (1971).Google Scholar
9. Etzold, K. F., Roy, R. A., Saenger, K. L., and Cuomo, J.J., "Electrical and Mechanical Properties of PZT Films". Mat. Res. Soc. Symp. Proc., this volume.Google Scholar