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Lattice Site of Helium Implanted in Si and Diamond

Published online by Cambridge University Press:  25 February 2011

William R. Allen
William R. Allen*
Affiliation:
Metals Ceramics Division, Oak Ridge National Laboratory, P.O. Box 2008, Oak Ridge, TN 37831–6376
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Abstract

Single crystals of silicon and diamond were implanted at 300K with 70 keV 3He. Ion channeling analyses were executed by application of Rutherford backscattering spectrometry and nuclear reaction analysis. Helium exhibits a non-random lattice site in the channeling angular distributions for silicon and diamond. A major fraction of the implanted 3He was qualitatively identified to be near to the tetrahedral interstice in both materials.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 279: Symposium A – Beam-Solid Interactions–Fundamentals and Applications , 1992 , 433
Copyright
Copyright © Materials Research Society 1993

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References

1.) Kaplan, D. R., Weigel, C. and Corbett, J. W., Phys. Stat. Sol (b) 94 (1979) 359.CrossRefGoogle Scholar
2.) Kótai, E., Pászti, F., Manuaba, A., Mezey, G., Gyulai, J., Barna, A., Barna, P. and Radnóczi, G., Nucl. Inst r. Meth B. 19/20 (1987) 312.CrossRefGoogle Scholar
3.) Wilson, R. G., J. Appl Phys. 61 (1987) 2489.CrossRefGoogle Scholar
4.) Wilson, R. G., Deline, V. R. and Hopkins, C. G., Appl Phys. Lett. 41 (1982) 930.Google Scholar
5.) Allen, W. R., Nucl. Instr. Meth. B. 61 (1991) 325.CrossRefGoogle Scholar
6.) Allen, W. R. and Zinkle, S. J., J. Nucl. Mater. 191–194 (1992) 625.CrossRefGoogle Scholar
7.) Allen, W. R., J. Nucl. Mater. 199, January (1993) In press.Google Scholar
8.) Allen, W. R., “Lattice Site of Helium in oi-SiC,” Submitted to J. Nucl. Mater.Google Scholar
9.) Ziegler, J. F., Biersack, J. P. and Littmark, U., The Stopping and Range of Ions in Solids (Pergamon, New York, 1985).Google Scholar
10.) Biersack, J. P. and Haggmark, L. G., Nucl. Instr. Meth. 174 (1980) 257.CrossRefGoogle Scholar
11.) Picraux, S. T. and Vook, F. L., Phys. Rev. B 18 (1978) 2066.CrossRefGoogle Scholar
12.) Bech Nielsen, B., Mat. Res. Symp. Proc. 59 (1986) 487.CrossRefGoogle Scholar
13.) Bech Nielsen, B., Andersen, J. U. and Pearton, S. J., Phys. Rev. Lett. 60 (1988) 321.CrossRefGoogle Scholar