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Laser/Optical Diagnostic Techniques for Plasma Materials Processing

Published online by Cambridge University Press:  25 February 2011

Ward C. Roman
Ward C. Roman*
Affiliation:
United Technologies Research Center East Hartford, Connecticut 06108
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Abstract

The application of plasma techniques is emerging as one of the more efficient means of processing materials. Technology transfer of plasma systems, both thermal and nonequilibrium, however, is severely limited by a lack of understanding of the basic mechanisms involved which govern the plasma processes used in many applications including advanced coatings. The aspects of plasma gas temperature, and species concentration and distribution (molecular, atomic, excited) in the gas phase and associated synergistic effects are fragmentary and unclear. Laser/optical diagnostic techniques represent a critical starting point for providing this needed information; they are in-situ, non-intrusive,species and quantum level specific and give excellent spatial and temporal resolution. A survey of Laser/optical diagnostic techniques applicable to plasma materials processing needs is presented. Some examples of the use of different techniques are also given.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 98: Symposium K – Plasma Processing and Synthesis of Materials II , 1987 , 161
Copyright
Copyright © Materials Research Society 1987

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References

REFERENCES

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