Article contents
Laser-Induced Photodeposition of Fe Films From Iron Carbonyl
Published online by Cambridge University Press: 21 February 2011
Abstract
Excimer laser photodecomposition of Fe(CO)5 has been used to produce large-area (≳ 1 cm2) Fe films on insulating and semiconducting substrates. Films were deposited in an ultrahigh vacuum system at room temperature or 77 K. Film composition and morphology were examined with Auger-depth profiling, scanning electron microscopy, x-ray fluorescence, and resistivity measurements. At appropriate laser power densities and Fe(CO)5 pressures, adherent metallic films were obtained. These films were typically less than 500 Å thick and contained less than 13% bulk oxygen and carbon contamination.
- Type
- Research Article
- Information
- Copyright
- Copyright © Materials Research Society 1984
References
REFERENCES
- 4
- Cited by