Hostname: page-component-cd9895bd7-lnqnp Total loading time: 0 Render date: 2024-12-27T01:30:57.972Z Has data issue: false hasContentIssue false
  • English
  • Français

Laser-Induced Deposition of Gold

Published online by Cambridge University Press:  28 February 2011

Thomas H. Baum
Thomas H. Baum*
Affiliation:
IBM Almaden Research Center, San Jose, California 95120-6099
Get access

Abstract

The laser-induced, vapor-phase deposition of gold metal from dimethyl-(2,4-pentanedionato) gold (III) and two fluorinated derivatives was examined by both photopyrolytic (LCVD) and photochemical modes of decomposition. High purity gold deposits are formed by LCVD with the rates of deposition being extremely vapor pressure dependent and thus, gold complex dependent. Photochemical deposition of gold patterns with 2 μm resolution can be achieved by irradiation of these complexes in the UV, but the deposited material is contaminated with carbon impurities.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 75: Symposium B – Photon, Beam, and Plasma Stimulated Chemical Processes at Surfaces , 1986 , 141
Copyright
Copyright © Materials Research Society 1987

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Gutfeld, R. J. Von, Tynan, E. E., Melcher, R. L. and Blum, S. E., Appl. Phys. Lett., 35, 651 (1979); R. J. Von Gutfeld, R. E. Acosta and L. T. Romankiw, IBM J. Res. Dev., 26, 136 (1982).Google Scholar
2. Gross, M. E., Applebaum, A. and Schnoes, K. J., J. Appl. Phys., 60, 529 (1986); M. E. Gross, G. J. Fisanick, P. K. Gallagher, K. J. Schnoes and M. D. Fennell, Appl. Phys. Lett., 47, 923 (1985); G. J. Fisanick, M. E. Gross, J. B. Hopkins, M. E. Fennell and K. J. Schnoes, J. Appl. Phys., 57, 1139 (1985).CrossRefGoogle Scholar
3. Baum, T. H. and Jones, C. R., Appl. Phys. Lett., 47, 538 (1985).Google Scholar
4. Baum, T. H. and Jones, C. R., J. Vac. Sci. Tech. B4, 1187 (1986).Google Scholar
5. Brain, F. H. and Gibson, C. S., J. Chem. Soc., 762, (1939); S. Komiya and J. K. Kochi, J. Amer. Chem. Soc., 99, 3695 (1978).Google Scholar
6. Klassen, R. B. and Baum, T. H., unpublished results.Google Scholar
7. Wolf, W. R., Sievers, R. E. and Brown, G. H., Inorg. Chem., 11, 1995 (1972).Google Scholar
8. Ehrlich, D. J. and Tsao, J. Y., J. Vac. Sci. Tech. B1, 969 (1983).CrossRefGoogle Scholar
9. Baum, T. H., J. Electrochem. Soc., submitted.Google Scholar
10. Larson, C. E., Baum, T. H. and Jackson, R. L., J. Electrochem. Soc., A4, 215 (1986).Google Scholar
11. Baum, T. H., Marinero, E. E. and Jones, C. R., Appl. Phys. Lett., 49, 1213 (1986).Google Scholar
12. Fackler, J. P. and Cotton, F. A., Inorg. Chem., 2, 102 (1962).Google Scholar
13. Renou, A. and Gillet, M., J. Cryst. Growth, 44, 190 (1978).CrossRefGoogle Scholar