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Laser Fabrication of Microstructures: Effect of Geometrical Scaling on Chemical Reaction Rates*

Published online by Cambridge University Press:  15 February 2011

D. J. Ehrlich  and
J. Y. Tsao
D. J. Ehrlich
Affiliation:
Lincoln Laboratory, Massachusetts Institute of TechnologyLexington, Massachusetts 02173
J. Y. Tsao
Affiliation:
Lincoln Laboratory, Massachusetts Institute of TechnologyLexington, Massachusetts 02173
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Abstract

Laser chemical processing for microfabrication makes use of chemical reactions and phase changes confined to micrometer-scale dimensions at vapor/solid and liquid/solid interfaces. When conditions are established for rapid interfacial reactions, processing speeds can become limited by diffusive transport. These diffusion-limited rates, however, increase by many orders of magnitude as the microreaction geometry is reduced to micrometer lengths using well-focused visible and UV beams. A calculation of the geometric scaling of such rates is summarized here. For realistic conditions, rate increases of up to four decades are predicted relative to corresponding reactions on semi-infinite plane surfaces.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 17: Symposium I – Laser Diagnostics and Photochemical Processing for Semiconductor Devices , 1982 , 3
Copyright
Copyright © Materials Research Society 1983

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Footnotes

*

This work was supported by the Army Research Office, the Department of the Air Force, in part under a specific program sponsored by the Air Force Office of Scientific Research, and by the Defense Advanced Research Projects Agency.

References

REFERENCES

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