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Large-area Deposition of Amorphous Silicon Alloys Using a Roll-to-roll Operation
Published online by Cambridge University Press: 01 February 2011
Abstract
Large-area deposition of thin-film amorphous silicon alloy triple-junction solar cells on lightweight and flexible stainless steel substrate is described. The proprietary roll-to-roll operation enables continuous depositions of sophisticated multi-layer structures. The deposition methods include sputtering and plasma-enhanced chemical vapor depositions. Spectrumsplitting triple-junction solar cell design, manufacturing processes, and product applications are presented.
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- Copyright © Materials Research Society 2005