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Large-area Deposition of Amorphous Silicon Alloys Using a Roll-to-roll Operation

Published online by Cambridge University Press:  01 February 2011

Subhendu Guha
Affiliation:
United Solar Ovonic Corporation, 1100 W. Maple Road, Troy, MI 48084, U.S.A.
Jeffrey Yang
Affiliation:
United Solar Ovonic Corporation, 1100 W. Maple Road, Troy, MI 48084, U.S.A.
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Abstract

Large-area deposition of thin-film amorphous silicon alloy triple-junction solar cells on lightweight and flexible stainless steel substrate is described. The proprietary roll-to-roll operation enables continuous depositions of sophisticated multi-layer structures. The deposition methods include sputtering and plasma-enhanced chemical vapor depositions. Spectrumsplitting triple-junction solar cell design, manufacturing processes, and product applications are presented.

Type
Research Article
Copyright
Copyright © Materials Research Society 2005

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