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Kinetics of Photodeposition of Superconducting Films

Published online by Cambridge University Press:  01 January 1992

C. H. Chen ,
R. C. Phillips  and
P. W. Morrison
C. H. Chen
Affiliation:
Oak Ridge National Laboratory, P. O. Box 2008, Oak Ridge, TN 37831–6378
R. C. Phillips
Affiliation:
Oak Ridge National Laboratory, P. O. Box 2008, Oak Ridge, TN 37831–6378
P. W. Morrison
Affiliation:
Advanced Fuel Research, 87 Church Street, E. Hartford, CT 06108
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Abstract

Kinetics of photodeposition of superconducting films was studied by using real time in-situ monitoring of gas phase species with mass spectrometry and thin-film properties by Fourier Transform Infrared (FTIR) spectrometry. A mass spectrometer was used to study wavelength and power dependent desorbed atoms and molecules during laser ablation process. FTIR was used to monitor the surface properties of thin film. Real time surface temperatures can be easily obtained by FTIR. By combinging mass spectrometry and FTIR, an optimum condition of making high-quality superconducting film can possibly be found.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 285: Symposium I – Laser Ablation in Materials Processing–Fundamentals and Applications , 1992 , 45
Copyright
Copyright © Materials Research Society 1993

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References

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