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Junctions of Carbon Nanotubes and Silicon Nanowires Synthesized by ethanol-Co Chemical Vapor Deposition

Published online by Cambridge University Press:  01 February 2011

Hideto Yoshida ,
Tetsuya Uchiyama ,
Jun Kikkawa ,
Seiji Takeda  and
Yoshikazu Homma
Hideto Yoshida
Affiliation:
[email protected], Osaka University, Graduate school of science, 1-1 Machikaneyama, Toyonaka, Osaka, 560-0043, Japan, +81 6 6850 5752, +81 6 6850 5759
Tetsuya Uchiyama
Affiliation:
[email protected], Osaka University, Department of Physics, Graduate School of Science, 1-1 Machikaneyama, Toyonaka, Osaka, 560-0043, Japan
Jun Kikkawa
Affiliation:
[email protected], Research Institute for Ubiquitous Energy Devices, National Institute of Advanced Industrial Science, 1-8-31 Midorigaoka, Ikeda, Osaka, 563-8577, Japan
Seiji Takeda
Affiliation:
[email protected], Osaka University, Department of Physics, Graduate School of Science, 1-1 Machikaneyama, Toyonaka, Osaka, 560-0043, Japan
Yoshikazu Homma
Affiliation:
[email protected], CREST, Japan Science and Technology Agency, Kawaguchi, Saitama, 332-0012, Japan
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Abstract

Carbon nanotubes (CNTs) have been grown on silicon nanowires (SiNWs) by chemical vapor deposition using Co catalyst nanoparticles. Single-walled CNTs have been grown mainly when a thin Co film (0.1 nm thick) was deposited on SiNWs, while both SWNTs and MWNTs have been grown on SiNWs on which Co 0.5 nm thick was deposited. The correlation between the diameter of catalyst nanoparticles and that of CNTs has been investigated by transmission electron microscopy. The average diameter of CNTs is smaller than that of catalyst nanoparticles.

Keywords

nanostructuretransmission electron microscopy (TEM)chemical vapor deposition (CVD) (deposition)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 963: Symposium Q – Nanowires and Carbon Nanotubes – Science and Applications , 2006 , 0963-Q10-08
Copyright
Copyright © Materials Research Society 2007

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References

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