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Ion-Plating Deposition of MgO Protective Layer for AC-Plasma Display Panels

Published online by Cambridge University Press:  17 March 2011

Kazuo Uetani ,
Hiroshi Kajiyama ,
Akira Kato ,
Isao Tokomoto ,
Yasuhiro Koizumi ,
Koichi Nose ,
Yasushi Ihara ,
Ken-ichi Onisawa  and
Tetsuroh Minemura
Kazuo Uetani
Affiliation:
R&D Center, ShinMaywa Industries, Ltd., 6-107 Tajikano-cho, Nishinomiya, Hyogo 663-8001, Japan
Hiroshi Kajiyama
Affiliation:
Hitachi Research Laboratory, Hitachi, Ltd., 7-1-1 Omika-cho, Hitachi, Ibaraki 319-1292, Japan
Akira Kato
Affiliation:
Hitachi Research Laboratory, Hitachi, Ltd., 7-1-1 Omika-cho, Hitachi, Ibaraki 319-1292, Japan
Isao Tokomoto
Affiliation:
R&D Center, ShinMaywa Industries, Ltd., 6-107 Tajikano-cho, Nishinomiya, Hyogo 663-8001, Japan
Yasuhiro Koizumi
Affiliation:
R&D Center, ShinMaywa Industries, Ltd., 6-107 Tajikano-cho, Nishinomiya, Hyogo 663-8001, Japan
Koichi Nose
Affiliation:
R&D Center, ShinMaywa Industries, Ltd., 6-107 Tajikano-cho, Nishinomiya, Hyogo 663-8001, Japan
Yasushi Ihara
Affiliation:
R&D Center, ShinMaywa Industries, Ltd., 6-107 Tajikano-cho, Nishinomiya, Hyogo 663-8001, Japan
Ken-ichi Onisawa
Affiliation:
Hitachi Research Laboratory, Hitachi, Ltd., 7-1-1 Omika-cho, Hitachi, Ibaraki 319-1292, Japan
Tetsuroh Minemura
Affiliation:
Hitachi Research Laboratory, Hitachi, Ltd., 7-1-1 Omika-cho, Hitachi, Ibaraki 319-1292, Japan
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Abstract

MgO thin films as a protective layer in plasma display panels (PDPs) were deposited by an advanced ion-plating (AIP) apparatus that we had developed. The AIP method enables plasma operation at low-pressures of 10−3 Pa. The MgO thin films were mainly (111) oriented with a small amount of randomly oriented textures. The preferred orientation of the films was dependent on deposition conditions; oxygen content and substrate temperature. Fine columnar structures grew with sharp apexes at the film surface. Secondary electron emission coefficient from a film deposited by the AIP method was higher than that by a conventional electron beam evaporation method. The MgO protective layer could be expected to improve PDPs by our AIP deposition.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 647: Symposium O – Ion Beam Synthesis & Processing of Advanced Materials , 2000 , O11.33
Copyright
Copyright © Materials Research Society 2001

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References

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