Hostname: page-component-586b7cd67f-l7hp2 Total loading time: 0 Render date: 2024-11-29T06:14:25.289Z Has data issue: false hasContentIssue false
  • English
  • Français

Ion Channeling Techniques for Defect and Surface Studies*

Published online by Cambridge University Press:  15 February 2011

B. R. Appleton
B. R. Appleton*
Affiliation:
Solid State Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37830
Get access

Abstract

The channeling and blocking phenomena are well enough understood that they can be combined with ion scattering or ion induced reactions to investigate defects and surface structures. A brief review is given of the origins of these phenomena, of associated concepts which are useful for defect and surface analysis, and of experimental constraints and requirements. Applications to selected problems are used to illustrate the advantages and limitations of these techniques.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 2: Symposium – Defects in Semiconductors I , 1980 , 97
Copyright
Copyright © Materials Research Society 1981

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Footnotes

*

Research sponsored by the Division of Materials Sciences, U.S. Department of Energy under contract W–7405–eng–26 with Union Carbide Corporation.

References

REFERENCES

1. Chu, W. K., “Application of Channeling to Defect Studies in Crystals,” these proceedings.Google Scholar
2. Picraux, S. T., “Ion Channeling Analysis,” these proceedings.Google Scholar
3. Gemmell, D. S., Rev. Mod. Phys. 46, N.1, 129 (1974) and references therein.Google Scholar
4. Channeling, ed. by Morgan, D. V. John Wiley and Sons, New York, 1973.Google Scholar
5. Lindhard, J., Danske Videnskab. Selskab., Kgl. Mat.-Fys. Medd. 34, No. 14 (1965).Google Scholar
6. New Uses of Ion Accelerators, ed. by. Zielger, J. F., Plenum Press, New York, 1975.Google Scholar
7. Chu, W. K., Mayer, J. W. and Nicolet, M. A., Backscattering Spectrometry, Academic Press, New York, 1978.CrossRefGoogle Scholar
8. White, C. W., Wilson, S. R., Appleton, B. R. and Young, F. W. Jr., J. Appl. Phys. 51, 738 (1980).Google Scholar
9. Feldman, L. C. and Appleton, B. R., Phys. Rev. B 8, 935 (1973).Google Scholar
10. Atomic Collisions in Solids, Vol. 1 and Vol. 2, ed. by Datz, S., Appleton, B. R. and Moak, C. D., Plenum Press, New York, 1975.Google Scholar
11. Eisen, F. H. and Bottiger, J., Ref. 10, p. 910.Google Scholar
12. Berliner, R. and Koehler, J. S., Rad. Effects, 28, 141 (1976).Google Scholar
13. Ecuyer, J. L', Brassard, C., Cardinal, C. and Terreault, B., Nucl. Instrum. and Methods 149, 271 (1978) and references therein.CrossRefGoogle Scholar
14. Feldman, L. C., ISISS 1979 Surface Science, Recent Progress and Perspective, CRC Press, Inc., Cleveland, Ohio, 1980 and references therein.Google Scholar
15. Feldman, L. C., Stensgaard, I., Silverman, P. J. and Jackman, T. E., The Physics of SiO2 and Its Interfaces, ed. by Pantelides, S. T., Pergamon Press, New York, p. 344, 1978.CrossRefGoogle Scholar
16. Feldman, L. C., Silverman, P. J., Williams, J. S., Jackman, T. E. and Stensgaard, I., Phys. Rev. Lett. 41, 1396 (1978).Google Scholar
17. Ion Beam Handbook for Material Analysis, ed. by Mayer, J. W. and Rimini, E., Academic Press, New York, p. 112, 1977.Google Scholar
18. Datz, S., Appleton, B. R. and Moak, C. D., p. 153 in Ref. 4 and references therein.Google Scholar
19. Appleton, B. R., Datz, S., Moak, C. D. and Robinson, M. T., Phys. Rev. B 4, 1452 (1971) andGoogle Scholar
Robinson, M. T., Phys. Rev. B 4, 1461 (1971).Google Scholar
20. Appleton, B. R., Moak, C. D., Noggle, T. S. and Barrett, J. H., Phys. Rev. Lett. 28, 1307 (1972); andCrossRefGoogle Scholar
Appleton, B. R., Barrett, J. H., Noggle, T. S. and Moak, C. D., Rad. Eff. 13, 171 (1972).Google Scholar
21. Kulikaushas, V. S., Maloo, M. M. and Tulinov, A. F., Soviet Phys. JETP 26, 321 (1968);Google Scholar
Zh. eksp. teor. Fiz. 53, 487 (1967).Google Scholar
22. Bogh, E., Can. J. Phys. 46, 653 (1968).CrossRefGoogle Scholar
23. Appleton, B. R. and Feldman, L. C., Atomic Collisions in Solids, ed. by Palmer, D. W., Thompson, M. W. and Townsend, P. D., North Holland, Amsterdam, p. 417, 1970.Google Scholar
24. Appleton, B. R., Noggle, T. S., Miller, J. W., Schow III, O. E., Zehner, D. M., Jenkins, L. H. and Barrett, J. H., Proceedings of the Third Conference on Applications of Small Accelerators, ed. by Duggan, J. L. and Morgan, I. L., ERDA Conf. 74–1040–PK (1974).Google Scholar
25. Appleton, B. R., Zehner, D. M., Noggle, T. S., Miller, J. W., Schow III, O. E., Jenkins, L. H. and Barrett, J. H., Ion Beam Surface Layer Analysis, Vol. 2, ed. by. Meyer, O., Linker, G. and Kappeler, F., Plenum Press, New York, p. 607, 1976.Google Scholar
26. Barrett, J. H., Phys. Rev. B 3, 1527 (1971).Google Scholar
27. Barrett, J. H., Phys. Rev. Lett. 31, 1542 (1973).Google Scholar
28. Barrett, J. H. as in Ref. 26 and 27.Google Scholar
29. Barrett, J. H., Phys. Rev. B 20, 3535 (1979) and references therein.Google Scholar
30. Holland, O. W. and Appleton, B. R., Scientific and Industrial Applications of Small Accelerators, ed. by Duggan, J. L., Morgan, I. L. and Martin, J. A., IEEE Proceedings 76CH 1175 9NPS, p. 585, 1976.Google Scholar
31. Grasso, F., Chapter 7, Ref. 4, and references therein.Google Scholar
32. Eisen, F. H., Chapter 14, Ref. 4, and references therein.Google Scholar
33. Mayer, J. W., Chapter 16, Ref. 4, and references therein.Google Scholar
34. Rimini, E., Materials Characterization Using Ion Beams, ed. by Thomas, J. P. and Cachard, A., Plenum Press, New York, p. 455, 1978.Google Scholar
35. Quere, Y., Rad. Eff. 28, 253 (1976).Google Scholar
36. White, C. W., Pronko, P. P., Wilson, S. R., Appleton, B. R., Narayan, J. and Young, R. T., J. Appl. Phys. 50(5), 3261 (1979) and references therein.Google Scholar
37. Williams, J. S., Nucl. Instrum. and Methods 149, 207 (1978).Google Scholar
38. Swanson, M. L. and Maury, F., Can. J. Phys. 53, 1117 (1975).Google Scholar
39. Swanson, M. L., Howe, L. M. and Quenneville, A. F., J. Nucl. Mater. 69/70, 744 (1978).Google Scholar
40. Swanson, M. L., Howe, L. M. and Quenneville, A. F., Nucl. Instrum. and Methods 170, 427 (1980) and references therein.Google Scholar
41. Swanson, M. L., Howe, L. M., Quenneville, A. F., Offermann, P. and Echer, K. H., J. Phys. Metal Phys. 10, 599 (1980) and references therein.Google Scholar
42. Wiggers, L. W. and Saris, F. W., Rad. Eff. 41, 149 (1979) and references therein.Google Scholar
43. Matsunami, N., Swanson, M. L. and Howe, L. M., Can. J. Phys. 56, 1057 (1978).Google Scholar
44. Barrett, J. H., Proceedings of Scientific and Industrial Applications of Small Accelerators, IEEE 176CH 1175–9NPS, p. 571, 1976.Google Scholar
45. Anderson, J. U., Andreasen, O., Davies, J. A. and Uggerhoj., E. Rad. Eff. 7, 25 (1971).Google Scholar
46. Van Vliet, D., Rad. Eff. 10, 137 (1971).Google Scholar
47. Barrett, J. H., private communications.Google Scholar
48. Smeenk, R. G., Tromp, R. M., Van der Veen, J. F. and Saris, F. W., Surf. Sci. 95, 156 (1980) and reference therein.Google Scholar
49. Taglauer, E. and Heiland, W., Appl. Phys. 9, 261 (1976) and references therein.Google Scholar
50. Zehner, D. M., Noonan, J. R., Davis, H. L. and White, C. W., J. Vac. Sci. Technol., March–April 1981 (in press).Google Scholar
51. Appleton, B. R., VII Inter. Conference on Atomic Collisions in Solids, September 19–23, 1977, Moscow State University, USSR, unpublished data.Google Scholar
52. Barrett, J. H. and Jackson, D. P., Nucl. Inst. and Methods 170, 115 (1980).Google Scholar
53. Appleton, B. R., Barrett, J. H. and Zehner, D. M., unpublished data.Google Scholar
54. Holland, O. W. and Appleton, B. R., submitted to Phys. Rev. Google Scholar
55. Pronko, P. P., Appleton, B. R., Holland, O. W. and Wilson, S. R., Phys. Rev. Lett. 43, 779 (1979).CrossRefGoogle Scholar
56. Barrett, J. H., Appleton, B. R. and Holland, O. W., Phys. Rev. B 22, 4180 (1980).CrossRefGoogle Scholar