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Ion Beam Machining of Micromechanical Structures

Published online by Cambridge University Press:  25 February 2011

S. T. Davies  and
D. K. Bowen
S. T. Davies
Affiliation:
Microengineering and Metrology Centre, Department of Engineering, University of Warwick, Coventry, CV4 7AL UK
D. K. Bowen
Affiliation:
Microengineering and Metrology Centre, Department of Engineering, University of Warwick, Coventry, CV4 7AL UK
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Abstract

The needs of high precision engineering currently call for dimensional tolerances of the order of 0.1μm and surface roughness of order 0.01μm, often in hard, brittle materials or materials of relatively poor machinability. The development of argon ion beam machining for milling, drilling and turning or lathing is reported as a means of satisfying these requirements. Highly controllable material removal is achieved for the fabrication of micromechanical structures, profiling of surfaces and fine surface finishing. Surface evolution at submicron precision is demonstrated, with particular reference to the production of both circular and non-circular sections in an “ion beam lathe”.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 76: Symposium C – Science and Technology of Microfabrication , 1986 , 135
Copyright
Copyright © Materials Research Society 1987

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References

REFERENCES

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