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Ion Beam Induced Conductivity Changes in Glassy Carbon

Published online by Cambridge University Press:  25 February 2011

D. McCulloch  and
S. Prawer
D. McCulloch
Affiliation:
Department of Applied Physics and Microelectronics and, Materials Research Centre, Royal Melbourne Institute of Technology, GPO Box 2476V, Melbourne, Victoria, 3001, Australia.
S. Prawer
Affiliation:
Department of Applied Physics and Microelectronics and, Materials Research Centre, Royal Melbourne Institute of Technology, GPO Box 2476V, Melbourne, Victoria, 3001, Australia.
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Abstract

Ion beam irradiation of Glassy Carbon is shown to increase its resistivity by up to eight orders of magnitude. These changes in resistivity are correlated with results obtained from Raman spectroscopy and Reflection High Energy Electron Diffraction. At high doses of C implantation there is convincing evidence that ion beam irradiation partially graphitizes the surface of Glassy Carbon.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 157: Symposium A – Beam-Solid Interactions: Physical Phenomena , 1989 , 825
Copyright
Copyright © Materials Research Society 1990

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References

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