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Ion Beam Deposition of Diamond-Like Coatings*

Published online by Cambridge University Press:  25 February 2011

Anton C. Greenwald ,
James K. Hirvonen  and
Narendra K. Jaggi
Anton C. Greenwald
Affiliation:
Spire Corporation, Redford, MA 01730
James K. Hirvonen
Affiliation:
Spire Corporation, Redford, MA 01730
Narendra K. Jaggi
Affiliation:
Northeastern University, Boston, MA 02115
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Abstract

Mass analyzed and non-mass analyzed carbon ion beams were used to deposit coatings on polished silicon wafers. Extremely, hard dense coatings that are structurally similar to i-carbon as determined by Ramon spectroscopy were achieved with high current beams of methane and argon. Residual contaminants of oxygen and nitrogen were minimized.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 128: Symposium A – Processing and Characterization of Materials Using Ion Beams , 1988 , 109
Copyright
Copyright © Materials Research Society 1989

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Footnotes

*

wthis research was funded by the U.S. Army Research Office Innovative Research contract number DAAL03-87-C-0028.

References

REFERENCES

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