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Ion Beam Deposition of Diamond-Like Coatings*
Published online by Cambridge University Press: 25 February 2011
Abstract
Mass analyzed and non-mass analyzed carbon ion beams were used to deposit coatings on polished silicon wafers. Extremely, hard dense coatings that are structurally similar to i-carbon as determined by Ramon spectroscopy were achieved with high current beams of methane and argon. Residual contaminants of oxygen and nitrogen were minimized.
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- Copyright © Materials Research Society 1989
Footnotes
wthis research was funded by the U.S. Army Research Office Innovative Research contract number DAAL03-87-C-0028.
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