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The Investigations of Dielectric Properties of BaTiO3 Thin Films on Polycrystalline Pt Substrates by Rf Magnetron Sputtering

Published online by Cambridge University Press:  10 February 2011

Jin Wook Jang ,
Woon Jo Cho ,
Taek Sang Hahn ,
Sang Sam Choi  and
Su Jin Chung
Jin Wook Jang
Affiliation:
Dept. Inorganic Materials Engineering, Seoul National University, Shillim-dong, Kwanak-gu, Seoul 151–742, Korea Applied Physics Laboratory, Division of Electronics and Information Technology, Korea Institute of Science and Technology, P.O. Box 131 Cheongryang, Seoul, Korea
Woon Jo Cho
Affiliation:
Applied Physics Laboratory, Division of Electronics and Information Technology, Korea Institute of Science and Technology, P.O. Box 131 Cheongryang, Seoul, Korea
Taek Sang Hahn
Affiliation:
Applied Physics Laboratory, Division of Electronics and Information Technology, Korea Institute of Science and Technology, P.O. Box 131 Cheongryang, Seoul, Korea
Sang Sam Choi
Affiliation:
Applied Physics Laboratory, Division of Electronics and Information Technology, Korea Institute of Science and Technology, P.O. Box 131 Cheongryang, Seoul, Korea
Su Jin Chung
Affiliation:
Dept. Inorganic Materials Engineering, Seoul National University, Shillim-dong, Kwanak-gu, Seoul 151–742, Korea
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Abstract

Thickness dependence of ferroelectric and structural properties of BaTiO3 thin films were investigated. Stoichiometric BaTiO3 thin films were prepared by off-axis rf magnetron sputtering on polycrystalline Pt substrates at 700°C. Film thickness range was 2,100–20,000Å. Room temperature permittivity, frequency dependence of permittivity, and D-E hysteresis loops were measured and lattice parameters were determined as a function of the film thickness. It has been found that these properties had the strong dependence on film thickness, which was mainly due to grain sizes of BaTiO3 thin films. The main cause of thickness dependence of dielectric properties was thought to be crystallinity and stresses of thin films which is resulted from changes in grain sizes.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 433: Symposium T – Ferroelectric Thin Films V , 1996 , 51
Copyright
Copyright © Materials Research Society 1996

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