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Investigation of the Optical Properties of Diamond-Like Carbon Films

Published online by Cambridge University Press:  10 February 2011

B. K. Kim  and
T. A. Grotjohn
B. K. Kim
Affiliation:
Electrical Engineering Dept., Michigan State Univ., East Lansing, MI 48824, [email protected]
T. A. Grotjohn
Affiliation:
Electrical Engineering Dept., Michigan State Univ., East Lansing, MI 48824, [email protected]
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Abstract

Hydrogenated-amorphous carbon films are deposited in a microwave ECR plasma reactor with an rf biased substrate holder using methane-argon and acetylene-argon gas mixtures. The film's optical properties are characterized versus deposition conditions including pressure (1–5 mTorr), rf induced bias (-100 to 20 volts), and argon/hydrocarbon flow ratio. The acetylene-argon discharges show that ion species formed from acetylene are more important than the argon ions, conversely, the methane-argon discharges showed that argon ions are a major ionic species in the deposition. The influence of the thickness of insulating substrates is studied and the feasibility of depositing multilayer a-C:H films with different film properties in each layer is demonstrated.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 498: Symposium AA – Covalently Bonded Disordered Thin-Film Materials , 1997 , 109
Copyright
Copyright © Materials Research Society 1998

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References

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