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Investigation of the Influence of Grain Size, Texture and Orientation on the Mechanical behavior of Freestanding Polycrystalline Gold Films

Published online by Cambridge University Press:  01 February 2011

Liwei Wang  and
Bart Prorok
Liwei Wang
Affiliation:
[email protected], Auburn University, Mechanical Engineering, 275 Wilmore Laboratory, Auburn, AL, 36849-5341, United States
Bart Prorok
Affiliation:
[email protected], Auburn University, Mechanical Engineering, 275 Wilmore Laboratory, Auburn, AL, 36849-5341, United States
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Abstract

Polycrystalline gold thin films with thickness of 250nm, 500nm and 1000nm were deposited on Si substrates by means of both E-Beam evaporation and sputtering techniques. High-resolution SEM, including electron-backscattered diffraction (EBSD), was employed to provide a crystallographic analysis including grain orientation maps of the studied films. The Membrane Deflection Experiment (MDE) was employed to perform the microscale tensile testing. The Young's modulus of gold films deposited by E-Beam evaporation was measured consistently in the range of 55-62 GPa while it increased to 68-72 GPa for sputtered films. Plastic yielding of the e-beam and sputtered films was contrasted due to varying microstructure of each deposition technique, which appears to assert a measure of control on the deformation mechanics.

Keywords

texturemicrostructurestress/strain relationship
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 924: Symposium Z – Mechanics of Nanoscale Materials and Devices , 2006 , 0924-Z03-13
Copyright
Copyright © Materials Research Society 2006

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