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Investigation of Ion Beam Mixing of Iron Marker Layers in Aluminum Oxide by RBS

Published online by Cambridge University Press:  25 February 2011

Elizabeth A. Cooper ,
Michael Nastasi  and
Kurt E. Sickafus
Elizabeth A. Cooper
Affiliation:
Los Alamos National Laboratory, Materials Science and Technology Division, Los Alamos, NM 87545
Michael Nastasi
Affiliation:
Los Alamos National Laboratory, Materials Science and Technology Division, Los Alamos, NM 87545
Kurt E. Sickafus
Affiliation:
Los Alamos National Laboratory, Materials Science and Technology Division, Los Alamos, NM 87545
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Abstract

Thin films made with a thin embedded marker layer of iron or iron oxide in amorphous alumina were ion mixed with 210 keV Ar over a temperature range of RT to 750°C in vacuum. The dose range was 5×l015-7×l016ions/cm2 with an average dose rate of 4.5×1012ions/cm2-sec. The resulting marker distributions were analyzed using RBS. Spreading of the iron RBS peak due to mixing into the alumina matrix was observed in the Fe2O3 marker samples and was clearly seen to be a function of temperature (>400°C) and dose, whereas for the Fe marker sample, no such temperature dependence was observed. An activation energy for the thermally assisted ion mixing in the Fe2O3 marker sample was determined to be 0.69 eV in comparison to an activation energy of 1.77 eV for samples that underwent only a thermal treatment.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 279: Symposium A – Beam-Solid Interactions–Fundamentals and Applications , 1992 , 457
Copyright
Copyright © Materials Research Society 1993

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