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Investigation of Dielectric Constant and Dispersion in Barium Strontium Titanate Capacitors

Published online by Cambridge University Press:  10 February 2011

Sufi Zafar ,
Peir Chu ,
T. Remmel ,
Robert E. Jones ,
Bruce White ,
David Gentile ,
Bo Jiang ,
Bradley Melnick ,
Deborah Taylor  and
Peter Zurcher
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Sufi Zafar
Affiliation:
Materials Research and Strategic Technologies, Motorola, 3501 Ed Bluestein Blvd. Austin, TX 78721, USA
Peir Chu
Affiliation:
Materials Research and Strategic Technologies, Motorola, 3501 Ed Bluestein Blvd. Austin, TX 78721, USA
T. Remmel
Affiliation:
Materials Research and Strategic Technologies, Motorola, 3501 Ed Bluestein Blvd. Austin, TX 78721, USA
Robert E. Jones
Affiliation:
Materials Research and Strategic Technologies, Motorola, 3501 Ed Bluestein Blvd. Austin, TX 78721, USA
Bruce White
Affiliation:
Materials Research and Strategic Technologies, Motorola, 3501 Ed Bluestein Blvd. Austin, TX 78721, USA
David Gentile
Affiliation:
Materials Research and Strategic Technologies, Motorola, 3501 Ed Bluestein Blvd. Austin, TX 78721, USA
Bo Jiang
Affiliation:
Materials Research and Strategic Technologies, Motorola, 3501 Ed Bluestein Blvd. Austin, TX 78721, USA
Bradley Melnick
Affiliation:
Materials Research and Strategic Technologies, Motorola, 3501 Ed Bluestein Blvd. Austin, TX 78721, USA
Deborah Taylor
Affiliation:
Materials Research and Strategic Technologies, Motorola, 3501 Ed Bluestein Blvd. Austin, TX 78721, USA
Peter Zurcher
Affiliation:
Materials Research and Strategic Technologies, Motorola, 3501 Ed Bluestein Blvd. Austin, TX 78721, USA
Sherry Gillespie
Affiliation:
Materials Research and Strategic Technologies, Motorola, 3501 Ed Bluestein Blvd. Austin, TX 78721, USA
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Abstract

The correlation between the dielectric constant and dispersion is investigated for barium strontium titanate (BST) capacitors with platinum and iridium electrodes. For platinum electrode capacitors, dispersion decreases with increasing dielectric constant. In contrast, capacitors with iridium electrodes exhibit the reverse correlation. A simple model is proposed to provide a quantitative explanation for the observed correlation for both platinum and iridium electrodes. In addition, the dependence of the dielectric constant and dispersion on varying ratios of (Ba+Sr)/Ti is also reported.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 493: Symposium U – Ferroelectric Thin Film VI , 1997 , 15
Copyright
Copyright © Materials Research Society 1998

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References

REFERENCES

1. Kotecki, David E., Integrated Ferroelectrics, 16, 1 (1997)Google Scholar
2. Tseng, T.Y., Proceedings of 1996 International Elecron Devices and Materials, C 2–5 (National Tsing Hua University, Hsinchu, Taiwan, 1996) p. 86 Google Scholar
3. Kingon, A. I., Streiffer, S. K., Basceri, C. and Summerfelt, S. R., Materials Research Society Bulletin, July 1996, p 46 Google Scholar
4. Horikawa, T., Makita, T., Kuroiwa, T. and Mikami, N., Jpn. J. Appl. Phys., 34 (1995) 5478 Google Scholar
5. Kato, Y., Yabuta, H., Sone, S., Yamaguchi, H., Iizuka, T., Yamamichi, S., Lesaicherre, P-Y, Nishimoto, S. and Yoshida, M., Materials Research Society Symposium Proceedings, volume 433, edited by Desu, S., Ramesh, R., Tuttle, B., Jones, R. E., Yoo, I. K., page 3 (1996).Google Scholar
6. Zafer, S., Jones, R. E., Chu, P., White, B., Jiang, B., Zurcher, P., Melnick, B., Taylor, D., and Gillespie, S., Electronic Materials conference, Fort Collins, Colorado, (1997)Google Scholar
7. Yamamichi, S., Yabuta, H., Sakuma, T., and Miyasaka, Y., Appl. Phy. Lett., 64 (1994), 1644 Google Scholar
8. White, B., et al., MRS Proceedings 1997, (unpublished)Google Scholar