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Investigation of Buffer Layers for GaN Grown by MBE

Published online by Cambridge University Press:  17 March 2011

Feng Yun
Affiliation:
Department of Electrical Engineering and Physics Department, Virginia Commonwealth University, Richmond, VA 23284
Michael A. Reshchikov
Affiliation:
Department of Electrical Engineering and Physics Department, Virginia Commonwealth University, Richmond, VA 23284
Paolo Visconti
Affiliation:
Department of Electrical Engineering and Physics Department, Virginia Commonwealth University, Richmond, VA 23284 Also with Istituto per lo Studio di Nuovi Materiali per l'Elettronica, CNR, Via Arnesano 73100 Lecce, Italy
Keith M. Jones
Affiliation:
Department of Electrical Engineering and Physics Department, Virginia Commonwealth University, Richmond, VA 23284
Dongfeng Wang
Affiliation:
Department of Electrical Engineering and Physics Department, Virginia Commonwealth University, Richmond, VA 23284
Marc Redmond
Affiliation:
Department of Electrical Engineering and Physics Department, Virginia Commonwealth University, Richmond, VA 23284
Jie Cui
Affiliation:
Department of Electrical Engineering and Physics Department, Virginia Commonwealth University, Richmond, VA 23284
Cole W. Litton
Affiliation:
Air Force Research Laboratory, Wright Patterson AFB, OH 45433, USA
Hadis Morkoç
Affiliation:
Department of Electrical Engineering and Physics Department, Virginia Commonwealth University, Richmond, VA 23284
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Abstract

The structural quality of the buffer layer juxtaposed to the substrate is pivotal in attaining high quality GaN layers. In MBE deposition, low temperature, medium temperature and high temperature AlN buffer layers are at the disposal of the grower. There are quite a few reports, some discussing the benefits of high temperature buffer layers and others doing the same for low temperature buffer layers. The reports emanate from different laboratories; and due to stringent parameter control required, it is difficult to compare one type of buffer with another. To gain some insight, we undertook an investigation wherein these varieties of buffer layers were grown on nitridated sapphire substrate under similar conditions for a comparative analysis. In addition to the single buffer layers of both GaN and AlN varieties, some combinations of stacked buffer layers, including cases where these buffer layers were separated by GaN layers, were employed. Structural analysis by high resolution X-ray diffractometry and topological analysis by AFM were carried out to assess the quality of the epilayers grown on these buffers. Hall measurements at room temperature were carried out to characterize the electrical transport properties.

Type
Research Article
Copyright
Copyright © Materials Research Society 2001

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References

REFERENCES

1 Morkoç, H., Nitride Semiconductors and Devices, Springer, 1999 Google Scholar
2 Jain, S. C., Willander, M., Narayan, J., Overstraeten, R. Van, J. Appl. Phys. 87, 965(2000)Google Scholar
3 Ambacher, O., J. Phys. D: Appl. Phys. 31, 2653(1998); S. J. Pearton, J. C. Zolper, R. J. Shul, and F. Ren, J. Appl. Phys. Vol. 86, pp. 1-78, (1999)Google Scholar
4 Angerer, H., O, Ambacher, Dimitrov, R., Metzger, T., Rieger, W. and Stutzmann, M., 1996 Mater. Res. Soc. Inter. J. Nit. Sem. Res. 1 15Google Scholar
5 Wu, X. H., Kapolnek, D., Tarsa, E. J., Heying, B., Keller, S., Keller, B. P., Mishra, U. K., Denbaars, S. P., and Speck, J. S., Appl. Phys. Lett. 68, 1371(1996)Google Scholar
6 Widmann, F., Feuillet, G., Daudin, B., and Rouviere, J. L., J. Appl. Phys. 85, 1550(1999)Google Scholar
7 Briot, O., Alexis, J. P., Tchounkeu, M., and Aulombard, R. L., Mater. Sci. Eng., B43, 147(1997); L. Sugiura, K. Itaya, J. Nishio, H. Fujimoto, and Y. Kokubun, J. Appl. Phys. 82, 4877(1997)Google Scholar
8 Heying, B., Wu, X. H., Keller, S., Li, Y., Keller, B., DenBaars, S. P., and Speck, J. S., Appl. Phys. Lett. 68, 643(1996)Google Scholar
9 Wang, T., Shirahama, T., Sun, H. B., Wang, H. X., Bai, J., and Sakai, S., and Misawa, H., Appl. Phys. Lett. 76, 2220(2000)Google Scholar