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Internal Stress Measurement on CVD diamond Coatings by X-ray Diffraction and Raman Spectroscopy

Published online by Cambridge University Press:  15 February 2011

K. Van Acker ,
H. Mohrbacher ,
B. Blanpain ,
P. Van Houtte  and
J.P. Celis
K. Van Acker
Affiliation:
Departement Metaalkunde en Toegepaste Materiaalkunde (MTM), Katholieke Universiteit Leuven, de Croylaan 2, B-3001 Leuven, Belgium
H. Mohrbacher
Affiliation:
Departement Metaalkunde en Toegepaste Materiaalkunde (MTM), Katholieke Universiteit Leuven, de Croylaan 2, B-3001 Leuven, Belgium
B. Blanpain
Affiliation:
Departement Metaalkunde en Toegepaste Materiaalkunde (MTM), Katholieke Universiteit Leuven, de Croylaan 2, B-3001 Leuven, Belgium
P. Van Houtte
Affiliation:
Departement Metaalkunde en Toegepaste Materiaalkunde (MTM), Katholieke Universiteit Leuven, de Croylaan 2, B-3001 Leuven, Belgium
J.P. Celis
Affiliation:
Departement Metaalkunde en Toegepaste Materiaalkunde (MTM), Katholieke Universiteit Leuven, de Croylaan 2, B-3001 Leuven, Belgium
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Abstract

Internal stresses are measured in CVD diamond coatings deposited on a variety of substrate materials by low incident beam angle X-ray diffraction and by micro-Raman spectroscopy. The X-ray diffraction technique gives an integral stress value over a comparably large coating area whereas the Raman technique results in localized stress information with a lateral resolution of down to 1 µm. The stress values obtained from both methods compare well for diamond coatings of 6 μm thickness whereas a difference is observed for thicker coatings.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 308: Symposium M1 – Thin Films: Stresses and Mechanical Properties IV , 1993 , 677
Copyright
Copyright © Materials Research Society 1993

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References

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