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Interfacial Layer Effects in Ba1-xSrxTiO3 Thick Films prepared by Plasma Spray

Published online by Cambridge University Press:  11 February 2011

Kipyung Ahn ,
Bruce W. Wessels  and
Sanjay Sampath
Kipyung Ahn
Affiliation:
Department of Materials Science and Engineering, Northwestern University, Evanston, IL 60208
Bruce W. Wessels
Affiliation:
Department of Materials Science and Engineering, Northwestern University, Evanston, IL 60208
Sanjay Sampath
Affiliation:
Department of Materials Science and Engineering, SUNY-Stony Brook, Stony Brook, NY 11794
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Abstract

The dielectric properties of high k dielectric thick films prepared by thermal spray were investigated. BaTiO3 and Ba0.68Sr0.32TiO3 thick films were deposited using plasma spray on Ag-Pd screen-printed alumina substrates. The sprayed films were predominantly polycrystalline but contained an amorphous second phase. The dielectric constants of the films decreased with decreasing film thickness in 10 ∼ 60 μm range. This was attributed to the presence of an interfacial layer between the film and the substrate as determined by capacitance measurements. The capacitance density of the interfacial layer was determined to be ∼ 2.7 nF/cm2. The capacitance density of the interfacial layer increased to 12 nF/cm2 after post heat treatment at 500 °C for 20 hours.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 758: Symposium LL – Rapid Prototyping Technologies , 2002 , LL2.7
Copyright
Copyright © Materials Research Society 2003

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References

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