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Integration of Zinc Oxide Thin Films with Polyimide-based Structures

Published online by Cambridge University Press:  01 February 2011

Masashi Matsumura ,
Zvonimir Bandic  and
Renato P. Camata
Masashi Matsumura
Affiliation:
Department of Physics, University of Alabama at Birmingham, Birmingham, AL 35294, U.S.A.
Zvonimir Bandic
Affiliation:
Hitachi Global Storage Technologies, Inc., San Jose, CA 95120, U.S.A.
Renato P. Camata
Affiliation:
Department of Physics, University of Alabama at Birmingham, Birmingham, AL 35294, U.S.A.
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Abstract

Zinc oxide (ZnO) films were deposited on polyimide-based substrates by pulsed laser deposition. The ZnO films and the underlying polymer layers were studied using Fourier Transform Infrared (FTIR) and Photoluminescence (PL) spectroscopies. FTIR measurements in structurally well-characterized samples exhibiting all X-ray reflections of crystalline hexagonal ZnO show absorbance bands around 405 cm-1(Zn-O stretching vibration) and 1110 cm-1 (in-plane C-H vibrations on aromatic rings of polyimide). Observed shifts in both absorption features as a function of deposition temperatures can probably be attributed to thermal stress in the layers. PL measurements showed broad spectra centered around 3.35 eV from ZnO excitonic emission and a broader PL band from 2.7 to 3.1 eV defect complex emissions. The appearance of these peaks was consistent for depositions of ZnO on non-organic substrates, which indicates that the integration of ZnO thin films on polymer based substrate preserved the characteristic optical properties of ZnO.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 869: Symposium D – Materials, Integration and Technology for Monolithic Instruments , 2005 , D1.7
Copyright
Copyright © Materials Research Society 2005

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