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Integrated Pyroelectric Infrared Sensor Using Pvdf thin Film Deposited by Electro-Spray Method

Published online by Cambridge University Press:  21 February 2011

Ryouji Asahi ,
Jiro Sakata ,
Osamu Tabata ,
Midori Mochizuki ,
Susumu Sugiyama  and
Yasunori Taga
Ryouji Asahi
Affiliation:
Toyota Central Research and Development Laboratories, Inc. Nagakute-cho, Aichi-gun, Aichi-ken, 480-11, Japan
Jiro Sakata
Affiliation:
Toyota Central Research and Development Laboratories, Inc. Nagakute-cho, Aichi-gun, Aichi-ken, 480-11, Japan
Osamu Tabata
Affiliation:
Toyota Central Research and Development Laboratories, Inc. Nagakute-cho, Aichi-gun, Aichi-ken, 480-11, Japan
Midori Mochizuki
Affiliation:
Toyota Central Research and Development Laboratories, Inc. Nagakute-cho, Aichi-gun, Aichi-ken, 480-11, Japan
Susumu Sugiyama
Affiliation:
Toyota Central Research and Development Laboratories, Inc. Nagakute-cho, Aichi-gun, Aichi-ken, 480-11, Japan
Yasunori Taga
Affiliation:
Toyota Central Research and Development Laboratories, Inc. Nagakute-cho, Aichi-gun, Aichi-ken, 480-11, Japan
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Abstract

A pyroelectric infrared sensor using a poly(vinylidene fluoride) (PVDF) thin film has been integrated with a read-out circuit on a silicon substrate. The PVDF thin film with a thickness of 1-2 µm was deposited on the sensing area by an electro-spray (ESP) method. A form I crystal and a large pyroelectric coefficient of 4 nCcm−2K−1 were observed just after the deposition without any poling treatments. The fabrication process of the sensor was based on a standard MOS LSI process and a polysilicon sacrificial layer etching technique. In order to reduce the heat capacitance and the thermal conduction, the PVDF thin film was supported on a thin Si3N4 membrane structure formed by etching a part of the silicon substrate under the sensing area. The sensor with a sensing area of 400x400 µm2 had a responsivity of 98 V/W, a detectivity of l.4× 107 cmHz1/2W−1, an NEP of 2.9× 10−99 Hz1/2W at a frequency of 100 Hz and a time constant of 1.3 msec.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 310: Symposium N – Ferroelectric Thin Films III , 1993 , 79
Copyright
Copyright © Materials Research Society 1993

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