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Integrated Magnetic Sensing of Electrostatically Actuated Thin-Film Microbridges

Published online by Cambridge University Press:  01 February 2011

J. Gaspar ,
Haohua Li ,
P.P. Freitas ,
V. Chu  and
J.P. Conde
J. Gaspar
Affiliation:
Instituto de Engenharia de Sistemas e Computadores - Microsistemas e Nanotecnologias (INESC MN), Rua Alves Redol 9, 1000-029 Lisbon, Portugal Department of Materials Engineering, Instituto Superior Técnico (IST), Av. Rovisco Pais, 1049-001 Lisbon, Portugal
Haohua Li
Affiliation:
Instituto de Engenharia de Sistemas e Computadores - Microsistemas e Nanotecnologias (INESC MN), Rua Alves Redol 9, 1000-029 Lisbon, Portugal Physics Department, Instituto Superior Técnico (IST), Av. Rovisco Pais, 1049-001 Lisbon, Portugal
P.P. Freitas
Affiliation:
Instituto de Engenharia de Sistemas e Computadores - Microsistemas e Nanotecnologias (INESC MN), Rua Alves Redol 9, 1000-029 Lisbon, Portugal Physics Department, Instituto Superior Técnico (IST), Av. Rovisco Pais, 1049-001 Lisbon, Portugal
V. Chu
Affiliation:
Instituto de Engenharia de Sistemas e Computadores - Microsistemas e Nanotecnologias (INESC MN), Rua Alves Redol 9, 1000-029 Lisbon, Portugal
J.P. Conde
Affiliation:
Department of Materials Engineering, Instituto Superior Técnico (IST), Av. Rovisco Pais, 1049-001 Lisbon, Portugal
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Abstract

Bilayer microbridges of aluminum and hydrogenated amorphous silicon are fabricated using thin film technology and surface micromachining at low temperatures on glass substrates. The microstructure is electrostatically actuated by applying a voltage between the bridge and a metal gate counter electrode placed beneath it. The movement is measured with a precision close to 0.1 Å by sensing the magnetic field of a permanent magnet, deposited and patterned on top of the microbridge, with an integrated spin valve magnetic sensor. The deflection of the bridge is at the same time monitored using an optical setup. The deflection of the structures is studied as a function of the driving applied gate voltage and bridge length and experimental results are analyzed with an electromechanical model.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 729: Symposium U – MEMS and BioMEMS , 2002 , U3.7
Copyright
Copyright © Materials Research Society 2002

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