No CrossRef data available.
Article contents
In-Situ Studies of the MBE Growth of CoSi2 on Si (111) in a UHV Transmission Electron Microscope
Published online by Cambridge University Press: 25 February 2011
Abstract
In-situ observations of the growth of CoSi2 films by Co deposition in an ultrahigh vacuum transmission electron microscope are described. Results include the observation of intermediate epitaxial phases (both hexagonally distorted Co2Si and CoSi) and the observation that pinholes nucleate in CoSi2 films after growth in a metastable layer mode.
- Type
- Research Article
- Information
- Copyright
- Copyright © Materials Research Society 1987