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In-Situ Rheed-Traxs Monitoring Alloy Composition of the Surface During RF-MBE Growth of GaInN and AIGaN

Published online by Cambridge University Press:  10 February 2011

A. Ito ,
H. Sakai ,
M. Inagaki ,
G. Nomura ,
Y Nakamura ,
T. Yasuda ,
H. Amano  and
I. Akasaki
A. Ito
Affiliation:
Department of Electrical and Electronic Engineering, Meijo University, 1-501 Shiogamaguchi, Tempaku-ku, Nagoya 468Japan, [email protected]
H. Sakai
Affiliation:
Department of Electrical and Electronic Engineering, Meijo University, 1-501 Shiogamaguchi, Tempaku-ku, Nagoya 468Japan, [email protected]
M. Inagaki
Affiliation:
Department of Electrical and Electronic Engineering, Meijo University, 1-501 Shiogamaguchi, Tempaku-ku, Nagoya 468Japan, [email protected]
G. Nomura
Affiliation:
Department of Electrical and Electronic Engineering, Meijo University, 1-501 Shiogamaguchi, Tempaku-ku, Nagoya 468Japan, [email protected]
Y Nakamura
Affiliation:
Department of Electrical and Electronic Engineering, Meijo University, 1-501 Shiogamaguchi, Tempaku-ku, Nagoya 468Japan, [email protected]
T. Yasuda
Affiliation:
Department of Electrical and Electronic Engineering, Meijo University, 1-501 Shiogamaguchi, Tempaku-ku, Nagoya 468Japan, [email protected]
H. Amano
Affiliation:
Department of Electrical and Electronic Engineering, Meijo University, 1-501 Shiogamaguchi, Tempaku-ku, Nagoya 468Japan, [email protected]
I. Akasaki
Affiliation:
Department of Electrical and Electronic Engineering, Meijo University, 1-501 Shiogamaguchi, Tempaku-ku, Nagoya 468Japan, [email protected]
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Abstract

In-situ reflection high energy electron diffraction total reflection angle X-ray spectroscopy (RHEED-TRAXS) was performed to monitor alloy composition at the surface during growth of nitrides by RF-MBE for the first time. TRAXS signal of the GaLα line is found to be more sensitive to the composition at the surface than the GaKαline. A difference in the composition of layer adsorbed on the surface and the solid alloy layer has been identified.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 482 , 1997 , 441
Copyright
Copyright © Materials Research Society 1998

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References

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