Hostname: page-component-78c5997874-fbnjt Total loading time: 0 Render date: 2024-11-06T11:05:09.266Z Has data issue: false hasContentIssue false

In-Situ Mechanical Characterization of a Freestanding 100 Nanometer Thick Aluminum Film in SEM Using MEMS Sensors

Published online by Cambridge University Press:  21 March 2011

Aman Haque
Affiliation:
Dept. of M&IE, University of Illinois at Urbana Champaign 140 MEB, 1206 W. Green St., Urbana, IL 61801
Taher Saif
Affiliation:
Dept. of M&IE, University of Illinois at Urbana Champaign 140 MEB, 1206 W. Green St., Urbana, IL 61801
Get access

Abstract

We present the uniaxial stress-strain response of a freestanding 100 nanometer thick 99.99% pure sputtered Aluminum film with grain size about 60 nanometers, tested in-situ inside a SEM chamber. The specimen is cofabricated with MEMS force and displacement sensors to minimize the experimental setup size, allowing both quantitative and in-situ tests to be performed in SEM and TEM chambers. The experimental results strongly suggest that at this size scale, a) Elastic modulus remains same as the bulk Aluminum, b) Yielding starts at about 625 MPa, and c) Strain hardening effect is absent, which indirectly suggests the deformation at this size scale is not dislocation mechanism based.

Type
Research Article
Copyright
Copyright © Materials Research Society 2002

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Masumura, R. A., Hazzledine, P. M., & Pande, C. S., Acta Materialia. 46 (13), 45274534 (1998).Google Scholar
2. Sciotz, J., Tolla, D. D., & Jacobsen, K. W., Nature, 391, 561563 (1998).Google Scholar
3. Huang, H., H., & Spaepen, F., Acta Materialia., 48 (12), 32613269 (2000).Google Scholar
4. Haque, M. A. & Saif, M. T. A., Experimental Mechanics (in press).Google Scholar
5. Haque, M. A. & Saif, M. T. A., Transducers 2001/Eurosensors XV, 2, 13741377 (2001).Google Scholar