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The In-Situ Measurement of Biaxial Modulus and Residual Stress of Multi-Layer Polymeric Thin Films

Published online by Cambridge University Press:  16 February 2011

Pinyen Lin  and
Stephen D. Senturia
Pinyen Lin
Affiliation:
Massachusetts Institute of Technology, Microsystems Technology Laboratory, Cambridge, MA 02139
Stephen D. Senturia
Affiliation:
Massachusetts Institute of Technology, Microsystems Technology Laboratory, Cambridge, MA 02139
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Polymeric coatings have been used in many ways from automobile paints to package coatings for integrated circuits. It is important to understand the mechanical properties of coatings in order to ensure fulfilling their designed functions. To measure these properties, in situ measurement techniques are desirable since these techniques measure the mechanical properties of coatings in the presence of the correct residual stress. In addition, the coatings most commonly used are multi-layer structures, a fact which increases the difficulty of the mechanical analysis. At present, the in situ mechanical behavior of multi-layer coatings has not been well characterized, and very few researchers have reported a satisfactory way to analyze multi-layer problems.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 188: Symposium K – Thin Films: Stresses and Mechanical Properties II , 1990 , 41
Copyright
Copyright © Materials Research Society 1990

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References

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