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In-Situ Ellipsometry and Light Scattering Studies of Substrate Cleaning and Initial Layer Deposition in Low Temperature CVD of Crystalline Si

Published online by Cambridge University Press:  25 February 2011

C. Pickering ,
D. J. Robbins ,
I. M. Young ,
J. L. Glasper ,
M. Johnson  and
R. Jones
C. Pickering
Affiliation:
Royal Signals and Radar Establishment, Malvern, Worcs, UK
D. J. Robbins
Affiliation:
Royal Signals and Radar Establishment, Malvern, Worcs, UK
I. M. Young
Affiliation:
Royal Signals and Radar Establishment, Malvern, Worcs, UK
J. L. Glasper
Affiliation:
Royal Signals and Radar Establishment, Malvern, Worcs, UK
M. Johnson
Affiliation:
Royal Signals and Radar Establishment, Malvern, Worcs, UK
R. Jones
Affiliation:
Royal Signals and Radar Establishment, Malvern, Worcs, UK
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Abstract

The first in-situ observations of initial stages of growth during Si vapour-phase homoepitaxy are reported, using the simultaneous measurement of dual-wavelength ellipsometry (364/488nm) and diffuse light scattering (488nm). Effective medium modelling shows that initial growth is nonuniform with pits present in the first 50–200Å of growth which rapidly fill in as growth proceeds. The sizes of the ellipsometric and scattering discontinuities are dependent on the extent of pre-growth roughening associated with oxide removal and finite wavelength effects become important for growth on roughened substrates.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 94: Symposium D – Initial Stages of Epitaxial Growth , 1987 , 173
Copyright
Copyright © Materials Research Society 1987

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References

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